Comment amtetcher SNF 2011-01-20 13:08:57: #3 Ox etch rate

karthikv at snf.stanford.edu karthikv at snf.stanford.edu
Thu Jan 20 13:08:57 PST 2011


Seems to be a bit low.
Tray #2 ~ 272 A/min 
Gas flows, pressure and power normal. Hex temperature was at 28C at the end of the etch




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