Shutdown amtetcher SNF 2011-01-31 17:12:34: Bell jar won't go up

karthikv at karthikv at
Mon Jan 31 17:12:34 PST 2011

The bell jar stopped working midway as I was trying to open the chamber to load my wafers. At first it didn't go up but it was able to go down and then it stopped responding completely.

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