From nharjee at snf.stanford.edu Mon Jul 4 11:43:16 2011 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Mon, 4 Jul 2011 11:43:16 -0700 Subject: Problem amtetcher SNF 2011-07-04 11:43:15: Turbo overloaded Message-ID: Similar to previous users, received "Turbo overloaded" error during 15 minute seasoning with Program 4. From cbaxter at snf.stanford.edu Tue Jul 5 08:24:18 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 5 Jul 2011 08:24:18 -0700 Subject: Problem amtetcher SNF 2011-07-04 11:43:15: Turbo overloaded Message-ID: Ran recipe#2 and 3 w/out problem.. From nharjee at snf.stanford.edu Tue Jul 5 12:21:13 2011 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Tue, 5 Jul 2011 12:21:13 -0700 Subject: Problem amtetcher SNF 2011-07-05 12:21:13: Turbo overloaded (again) Message-ID: During a 5.4 min etch using Program 4 I received the "Turbo overloaded" error and the etch stopped. There is clearly a problem with this tool. Please do not mark it green until the problem has been root caused. Running 1 or 2 times without being able to repro does not count. From mdickey at snf.stanford.edu Tue Jul 5 13:23:15 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 5 Jul 2011 13:23:15 -0700 Subject: Comment amtetcher SNF 2011-07-05 13:23:14: RF Message-ID: There is suspected RF interference causing intermittent problems. Will consult Elmer when he comes in tomorrow morning. From eenriquez at snf.stanford.edu Wed Jul 6 19:40:50 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 6 Jul 2011 19:40:50 -0700 Subject: Problem amtetcher SNF 2011-07-05 12:21:13: Turbo overloaded (again) Message-ID: Found the root cause for the RF noise which was causing the pressure readout to trip the over pressure limit. Found heavy arcing inside the RF connection box. The RF grounding gasket was worn and was not providing a sufficiently good ground connection. Replaced the gasket and installed additional grounding straps. Ran many times without any sign of RF noise (unusual characters on the display) From eenriquez at snf.stanford.edu Wed Jul 6 19:40:59 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 6 Jul 2011 19:40:59 -0700 Subject: Comment amtetcher SNF 2011-07-05 13:23:14: RF Message-ID: Archived From latta at snf.stanford.edu Thu Jul 7 15:45:01 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 7 Jul 2011 15:45:01 -0700 Subject: Comment amtetcher SNF 2011-07-07 15:45:01: Ran ASML target recipe- ER still low Message-ID: Prog #4 00:05:00 Average depth = 886 Etch Rate = 177A/min Time for 1200A etch = 00:06:48 From barlian at snf.stanford.edu Fri Jul 22 16:42:06 2011 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Fri, 22 Jul 2011 16:42:06 -0700 Subject: Problem amtetcher SNF 2011-07-22 16:42:06: arching Message-ID: i didn't use it. i raised the bell jar and saw arching. From barlian at snf.stanford.edu Fri Jul 22 16:42:13 2011 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Fri, 22 Jul 2011 16:42:13 -0700 Subject: Shutdown amtetcher SNF 2011-07-22 16:42:13: arching Message-ID: From mdickey at snf.stanford.edu Mon Jul 25 07:41:56 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 25 Jul 2011 07:41:56 -0700 Subject: Shutdown amtetcher SNF 2011-07-22 16:42:13: arching Message-ID: replaced burnt ardels, running recipe 2, no arcing observed From barlian at snf.stanford.edu Mon Jul 25 17:14:58 2011 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Mon, 25 Jul 2011 17:14:58 -0700 Subject: Problem amtetcher SNF 2011-07-25 17:14:58: high vacuum leak Message-ID: while running program 3 From eenriquez at snf.stanford.edu Tue Jul 26 07:57:49 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 Jul 2011 07:57:49 -0700 Subject: Problem amtetcher SNF 2011-07-22 16:42:06: arching Message-ID: Replaced burnt ardel insulators. From eenriquez at snf.stanford.edu Tue Jul 26 09:49:42 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 Jul 2011 09:49:42 -0700 Subject: Problem amtetcher SNF 2011-07-25 17:14:58: high vacuum leak Message-ID: No problem found. From eenriquez at snf.stanford.edu Thu Jul 28 08:54:55 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 28 Jul 2011 08:54:55 -0700 Subject: Problem amtetcher SNF 2011-07-28 08:54:54: Freon 23 not available Message-ID: New gas cylinder from the vendor came empty. Trying to acquire another cylinder asap. From kokab at snf.stanford.edu Thu Jul 28 23:17:23 2011 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Thu, 28 Jul 2011 23:17:23 -0700 Subject: Problem amtetcher SNF 2011-07-28 23:17:23: Flow2 out limited in process 3 Message-ID: From mdickey at snf.stanford.edu Fri Jul 29 13:44:53 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 29 Jul 2011 13:44:53 -0700 Subject: Problem amtetcher SNF 2011-07-28 08:54:54: Freon 23 not available Message-ID: Freon 23 back on line From mdickey at snf.stanford.edu Fri Jul 29 13:45:08 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 29 Jul 2011 13:45:08 -0700 Subject: Problem amtetcher SNF 2011-07-28 23:17:23: Flow2 out limited in process 3 Message-ID: archived From popomoo at snf.stanford.edu Sat Jul 30 08:18:51 2011 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Sat, 30 Jul 2011 08:18:51 -0700 Subject: Problem amtetcher SNF 2011-07-30 08:18:51: LOADER does not work. Message-ID: When I pressed two red buttons of LOADER, the cover does not go down, which causes problems when I changed wafers. From junam at snf.stanford.edu Sun Jul 31 17:55:02 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sun, 31 Jul 2011 17:55:02 -0700 Subject: Problem amtetcher SNF 2011-07-31 17:55:02: loader does not work Message-ID: experienced the same problem popomoo reported