Problem amtetcher SNF 2011-07-05 12:21:13: Turbo overloaded (again)

nharjee at snf.stanford.edu nharjee at snf.stanford.edu
Tue Jul 5 12:21:13 PDT 2011


During a 5.4 min etch using Program 4 I received the "Turbo overloaded" error and the etch stopped. There is clearly a problem with this tool. Please do not mark it green until the problem has been root caused. Running 1 or 2 times without being able to repro does not count.




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