Comment amtetcher SNF 2011-07-07 15:45:01: Ran ASML target recipe- ER still low

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Jul 7 15:45:01 PDT 2011


Prog #4  00:05:00
Average depth = 886
Etch Rate = 177A/min
Time for 1200A etch = 00:06:48




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