Problem amtetcher SNF 2011-07-22 16:42:06: arching
barlian at snf.stanford.edu
barlian at snf.stanford.edu
Fri Jul 22 16:42:06 PDT 2011
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Comment amtetcher SNF 2011-07-07 15:45:01: Ran ASML target recipe- ER still low
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Problem amtetcher SNF 2011-07-22 16:42:06: arching
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i didn't use it. i raised the bell jar and saw arching.
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Comment amtetcher SNF 2011-07-07 15:45:01: Ran ASML target recipe- ER still low
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Problem amtetcher SNF 2011-07-22 16:42:06: arching
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