From srikantv at snf.stanford.edu Wed Jun 1 01:52:30 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Wed, 1 Jun 2011 01:52:30 -0700 Subject: Shutdown amtetcher SNF 2011-06-01 01:52:29: Message-ID: From eenriquez at snf.stanford.edu Wed Jun 1 19:30:46 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Jun 2011 19:30:46 -0700 Subject: Comment amtetcher SNF 2011-06-01 19:30:46: Update hoist lift Message-ID: Installed new bearing. Found out that the motor is also defective. Need to order a new motor. We will reinstall the manual lift tomorrow. From eenriquez at snf.stanford.edu Thu Jun 2 13:46:50 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Jun 2011 13:46:50 -0700 Subject: Shutdown amtetcher SNF 2011-06-01 01:52:29: Message-ID: Available for manual bell jar lift operation From eenriquez at snf.stanford.edu Thu Jun 2 15:05:10 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Jun 2011 15:05:10 -0700 Subject: Comment amtetcher SNF 2011-06-02 15:05:10: Manual bell jar hoist usage Message-ID: Please do not use the etcher if you have not been shown how to operate the hoist. If you need training on how to use the hoist, please contact an etch staff during office hours or any users who have been trained. The users who have been trained so far are: srikantv, cursive, zzp and sclaussen. From sgchong at snf.stanford.edu Sat Jun 4 01:46:47 2011 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sat, 4 Jun 2011 01:46:47 -0700 Subject: Problem amtetcher SNF 2011-06-04 01:46:47: Difficult to get bell jar down Message-ID: The bell jar keeps getting stuck and does not fully come down. Giving the bar that holds the bell jar a few shakes sometimes helps. Seems like the bell jar is not coming down straight. From hongyuc at snf.stanford.edu Sat Jun 4 15:24:22 2011 From: hongyuc at snf.stanford.edu (hongyuc at snf.stanford.edu) Date: Sat, 4 Jun 2011 15:24:22 -0700 Subject: Problem amtetcher SNF 2011-06-04 15:24:21: the bell cannot fully come down... Message-ID: From grahamab at snf.stanford.edu Tue Jun 7 01:46:27 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 7 Jun 2011 01:46:27 -0700 Subject: Problem amtetcher SNF 2011-06-07 01:46:27: display messing up again Message-ID: the display appears to be randomly displaying gibberish again. From mdickey at snf.stanford.edu Tue Jun 7 07:19:17 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 7 Jun 2011 07:19:17 -0700 Subject: Comment amtetcher SNF 2011-06-07 07:19:17: NF3 Message-ID: Need to change the NF3 bottle From eenriquez at snf.stanford.edu Tue Jun 7 07:56:22 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Jun 2011 07:56:22 -0700 Subject: Comment amtetcher SNF 2011-05-24 15:14:32: Up ONLY from 6am to 3:30pm Message-ID: archived From eenriquez at snf.stanford.edu Tue Jun 7 07:58:13 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Jun 2011 07:58:13 -0700 Subject: Problem amtetcher SNF 2011-06-04 01:46:47: Difficult to get bell jar down Message-ID: Raised the lead screw. It had slipped down and was preventing the hoist from going all the way down. From eenriquez at snf.stanford.edu Tue Jun 7 07:58:22 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Jun 2011 07:58:22 -0700 Subject: Problem amtetcher SNF 2011-06-04 15:24:21: the bell cannot fully come down... Message-ID: Raised the lead screw. It had slipped down and was preventing the hoist from going all the way down From eenriquez at snf.stanford.edu Wed Jun 8 07:51:29 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Jun 2011 07:51:29 -0700 Subject: Comment amtetcher SNF 2011-06-07 07:19:17: NF3 Message-ID: Changed NF3 cylinder From eenriquez at snf.stanford.edu Wed Jun 8 15:03:58 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Jun 2011 15:03:58 -0700 Subject: Shutdown amtetcher SNF 2011-06-08 15:03:58: Hoist not working. Message-ID: From eenriquez at snf.stanford.edu Thu Jun 9 10:44:01 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Jun 2011 10:44:01 -0700 Subject: Shutdown amtetcher SNF 2011-06-08 15:03:58: Hoist not working. Message-ID: Reistalled manual bell jar hoist. Need to troubleshoot the electrical hoist further. From grahamab at snf.stanford.edu Thu Jun 9 19:59:37 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 9 Jun 2011 19:59:37 -0700 Subject: Problem amtetcher SNF 2011-06-09 19:59:37: turbo purge high error Message-ID: got a "turbo purge high" error twice while running program #3. From grahamab at snf.stanford.edu Thu Jun 9 20:29:01 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 9 Jun 2011 20:29:01 -0700 Subject: Problem amtetcher SNF 2011-06-09 20:29:00: pump stack leak Message-ID: after finishing my final etch and venting, the tool showed "pump stack leak" From grahamab at snf.stanford.edu Thu Jun 9 20:29:41 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 9 Jun 2011 20:29:41 -0700 Subject: Shutdown amtetcher SNF 2011-06-09 20:29:40: turbo pump off Message-ID: during unload of wafers, turbo pump stopped. bell jar is down, but can't run standby recipe. From eenriquez at snf.stanford.edu Fri Jun 10 09:45:46 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Jun 2011 09:45:46 -0700 Subject: Shutdown amtetcher SNF 2011-06-09 20:29:40: turbo pump off Message-ID: adjusted the turbo purge and restarted the turbo. From eenriquez at snf.stanford.edu Fri Jun 10 09:45:52 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Jun 2011 09:45:52 -0700 Subject: Problem amtetcher SNF 2011-06-09 20:29:00: pump stack leak Message-ID: adjusted the turbo purge and restarted the turbo. From eenriquez at snf.stanford.edu Fri Jun 10 09:45:58 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Jun 2011 09:45:58 -0700 Subject: Problem amtetcher SNF 2011-06-09 19:59:37: turbo purge high error Message-ID: adjusted the turbo purge and restarted the turbo. From eenriquez at snf.stanford.edu Fri Jun 10 09:47:15 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Jun 2011 09:47:15 -0700 Subject: Problem amtetcher SNF 2011-06-07 01:46:27: display messing up again Message-ID: covered an opening in the matching network with copper tape From eenriquez at snf.stanford.edu Fri Jun 10 09:47:38 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Jun 2011 09:47:38 -0700 Subject: Problem amtetcher SNF 2011-05-12 09:39:51: Front display problem Message-ID: covered and opening in the matching network with copper tape. From zzp at snf.stanford.edu Fri Jun 10 23:12:47 2011 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Fri, 10 Jun 2011 23:12:47 -0700 Subject: Shutdown amtetcher SNF 2011-06-10 23:12:46: pump stack leak Message-ID: cannot run any program From cbaxter at snf.stanford.edu Sun Jun 12 22:23:29 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 12 Jun 2011 22:23:29 -0700 Subject: Comment amtetcher SNF 2011-06-12 22:23:29: Vacuum Leak Message-ID: The foreline on rough down to 387mt, posible leak on the main\ isolation valve.. From eenriquez at snf.stanford.edu Mon Jun 13 11:45:33 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Jun 2011 11:45:33 -0700 Subject: Shutdown amtetcher SNF 2011-06-10 23:12:46: pump stack leak Message-ID: Found debris on the roughing valve seat o-ring. Cleaned the o-ring and tested. From eenriquez at snf.stanford.edu Mon Jun 13 11:45:41 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Jun 2011 11:45:41 -0700 Subject: Comment amtetcher SNF 2011-06-12 22:23:29: Vacuum Leak Message-ID: Archived From zzp at snf.stanford.edu Tue Jun 14 11:43:12 2011 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Tue, 14 Jun 2011 11:43:12 -0700 Subject: Problem amtetcher SNF 2011-06-14 11:43:12: turbo overloaded Message-ID: recipe stopped in the first minute; tried several times, still the same error From eenriquez at snf.stanford.edu Tue Jun 14 14:29:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Jun 2011 14:29:47 -0700 Subject: Problem amtetcher SNF 2011-06-14 11:43:12: turbo overloaded Message-ID: No problem found. Unable to duplicate the problem. Ran recipe #3 (3x). The third time, I went through the whole cycle of venting the chamber and then running the process. Also ran recipe 2. From eenriquez at snf.stanford.edu Wed Jun 15 13:30:02 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Jun 2011 13:30:02 -0700 Subject: Comment amtetcher SNF 2011-06-15 13:30:00: Update bell jar hoist Message-ID: Performed a test to determine if the problem is mechanical or electrical. The problem is definitely mechanical. From jasonlin at snf.stanford.edu Fri Jun 17 03:18:58 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Fri, 17 Jun 2011 03:18:58 -0700 Subject: Problem amtetcher SNF 2011-06-17 03:18:57: Turbo Overloaded Message-ID: I was walking by and noticed the message "Turbo Overloaded" during the etch part of process 2. From mdickey at snf.stanford.edu Fri Jun 17 10:27:37 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 17 Jun 2011 10:27:37 -0700 Subject: Comment amtetcher SNF 2011-06-17 10:27:37: trays Message-ID: Cleaned up and adjusted trays. Ran recipe 2 without problems From eenriquez at snf.stanford.edu Fri Jun 17 10:29:25 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Jun 2011 10:29:25 -0700 Subject: Problem amtetcher SNF 2011-06-17 03:18:57: Turbo Overloaded Message-ID: Mike replaced several burnt ardel insulators From mislam at snf.stanford.edu Sat Jun 18 22:41:12 2011 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 18 Jun 2011 22:41:12 -0700 Subject: Problem amtetcher SNF 2011-06-18 22:41:12: Tray#3 not in good contact to contact tab Message-ID: Contact tab above Tray#3 not sitting in all the way, this could cause arcing as contact is poor. From eenriquez at snf.stanford.edu Mon Jun 20 11:48:22 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Jun 2011 11:48:22 -0700 Subject: Problem amtetcher SNF 2011-06-18 22:41:12: Tray#3 not in good contact to contact tab Message-ID: Adjusted tray #3 and tray #1 From rik at snf.stanford.edu Mon Jun 20 20:08:36 2011 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Mon, 20 Jun 2011 20:08:36 -0700 Subject: Problem amtetcher SNF 2011-06-20 20:08:35: Clip for top wafer in Tray #1 is broken Message-ID: From mislam at snf.stanford.edu Tue Jun 21 21:44:04 2011 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 21 Jun 2011 21:44:04 -0700 Subject: Problem amtetcher SNF 2011-06-21 21:44:03: Getting frequent "Turbooverloaded" error Message-ID: Run stops. Sometimes works after restart From eenriquez at snf.stanford.edu Wed Jun 22 09:00:14 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Jun 2011 09:00:14 -0700 Subject: Shutdown amtetcher SNF 2011-06-22 09:00:13: Working on hoist Message-ID: From eenriquez at snf.stanford.edu Wed Jun 22 19:52:07 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Jun 2011 19:52:07 -0700 Subject: Comment amtetcher SNF 2011-06-22 19:52:06: Update hoist problem Message-ID: We found the root cause of the hoist problem. There are two bearings at the base of the hoist that had been crushed. The bearings have been ordered and they should be here on Friday. The cup assembly at the bottom of the hoist will also need to be machined in order to accept the new bearings. The tool might be ready by Friday but most likely next Monday. From eenriquez at snf.stanford.edu Thu Jun 23 12:29:58 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Jun 2011 12:29:58 -0700 Subject: Problem amtetcher SNF 2011-06-20 20:08:35: Clip for top wafer in Tray #1 is broken Message-ID: Repaired clip From eenriquez at snf.stanford.edu Thu Jun 23 12:45:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Jun 2011 12:45:47 -0700 Subject: Shutdown amtetcher SNF 2011-06-22 09:00:13: Working on hoist Message-ID: Re-installed the manual hoist. Waiting for replacement bearings. Will schedule to install repaired hoist next Tuesday From eenriquez at snf.stanford.edu Thu Jun 23 12:47:22 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Jun 2011 12:47:22 -0700 Subject: Problem amtetcher SNF 2011-06-21 21:44:03: Getting frequent "Turbooverloaded" error Message-ID: Moved main RF cable away from electrical wires. Ran recipe#2 several times with no problems. From eenriquez at snf.stanford.edu Tue Jun 28 14:47:51 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Jun 2011 14:47:51 -0700 Subject: Comment amtetcher SNF 2011-06-28 14:47:50: Update hoist Message-ID: The automatic bell jar hoist is now operational. Installed new bearings, adjusted the brakes and position switches. Cycled many times without any problems. We'll complete reassembly tomorrow. From eenriquez at snf.stanford.edu Thu Jun 30 10:26:44 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Jun 2011 10:26:44 -0700 Subject: Comment amtetcher SNF 2011-06-17 10:27:37: trays Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jun 30 10:27:36 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Jun 2011 10:27:36 -0700 Subject: Problem amtetcher SNF 2011-05-18 21:52:51: Bell jar will not raise Message-ID: Replaced crushed bearings at the base of the bell jar hoist From eenriquez at snf.stanford.edu Thu Jun 30 10:27:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Jun 2011 10:27:47 -0700 Subject: Comment amtetcher SNF 2011-05-20 15:18:02: Update bell jar Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jun 30 10:27:52 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Jun 2011 10:27:52 -0700 Subject: Comment amtetcher SNF 2011-06-01 19:30:46: Update hoist lift Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jun 30 10:27:58 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Jun 2011 10:27:58 -0700 Subject: Comment amtetcher SNF 2011-06-02 15:05:10: Manual bell jar hoist usage Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jun 30 10:28:04 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Jun 2011 10:28:04 -0700 Subject: Comment amtetcher SNF 2011-06-15 13:30:00: Update bell jar hoist Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jun 30 10:28:09 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Jun 2011 10:28:09 -0700 Subject: Comment amtetcher SNF 2011-06-22 19:52:06: Update hoist problem Message-ID: Archived From eenriquez at snf.stanford.edu Thu Jun 30 10:28:15 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Jun 2011 10:28:15 -0700 Subject: Comment amtetcher SNF 2011-06-28 14:47:50: Update hoist Message-ID: Archived