Problem amtetcher SNF 2011-06-20 20:08:35: Clip for top wafer in Tray #1 is broken
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Jun 23 12:29:58 PDT 2011
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Problem amtetcher SNF 2011-06-20 20:08:35: Clip for top wafer in Tray #1 is broken
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Problem amtetcher SNF 2011-06-21 21:44:03: Getting frequent "Turbooverloaded" error
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Repaired clip
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Problem amtetcher SNF 2011-06-20 20:08:35: Clip for top wafer in Tray #1 is broken
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Problem amtetcher SNF 2011-06-21 21:44:03: Getting frequent "Turbooverloaded" error
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