Problem amtetcher SNF 2011-03-21 16:34:33: Lot of particles inside the chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Mar 22 09:39:21 PDT 2011


User's are more than welcome to clean the base plate using lint free paper and IPA.  Cleaned the baseplate and ran the standby recipe with no problems.




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