From latta at snf.stanford.edu Tue May 10 16:50:52 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 10 May 2011 16:50:52 -0700 Subject: Problem amtetcher SNF 2011-05-10 16:50:51: Reflected power jumpy Message-ID: While running prog#3 during training (3 mins) we noticed that the reflected power jumped from the usual 26 to 288W. The RF power was steady and no arcing was observed. Also, the display showed some strange characters.... From eenriquez at snf.stanford.edu Thu May 12 09:28:20 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 May 2011 09:28:20 -0700 Subject: Problem amtetcher SNF 2011-05-10 16:50:51: Reflected power jumpy Message-ID: Reflected power is OK, tt is just a display issue. The 288 watts reflected power observed was actually 28.8 watts. From eenriquez at snf.stanford.edu Thu May 12 09:39:52 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 May 2011 09:39:52 -0700 Subject: Problem amtetcher SNF 2011-05-12 09:39:51: Front display problem Message-ID: The system is fully functional and the recipes run with no problems. The front display however shows random charaters. We will replace the display board next week. From latta at snf.stanford.edu Tue May 17 09:32:39 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 17 May 2011 09:32:39 -0700 Subject: Comment amtetcher SNF 2011-04-14 07:55:14: previous user didn't run pump program Message-ID: archived From gyama at snf.stanford.edu Wed May 18 10:09:35 2011 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Wed, 18 May 2011 10:09:35 -0700 Subject: Shutdown amtetcher SNF 2011-05-18 10:09:34: vented bell jar will not hoist, slipping noise Message-ID: From eenriquez at snf.stanford.edu Wed May 18 15:30:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 May 2011 15:30:47 -0700 Subject: Shutdown amtetcher SNF 2011-05-18 10:09:34: vented bell jar will not hoist, slipping noise Message-ID: Unloaded the user's wafers. Adjusted the brake, lubricated the brake actuator and adjusted the actuator tensioner. From sclaussen at snf.stanford.edu Wed May 18 21:52:52 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Wed, 18 May 2011 21:52:52 -0700 Subject: Problem amtetcher SNF 2011-05-18 21:52:51: Bell jar will not raise Message-ID: Did not shut it down in case another user can fix it. From eenriquez at snf.stanford.edu Thu May 19 14:27:05 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 May 2011 14:27:05 -0700 Subject: Shutdown amtetcher SNF 2011-05-19 14:27:04: Bell jar needs to be rebuilt Message-ID: Bell jar operation is intermittent. Seems to be binding inside the drive mechanism. We'll rebuild it tomorrow. From eenriquez at snf.stanford.edu Fri May 20 15:18:03 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 May 2011 15:18:03 -0700 Subject: Comment amtetcher SNF 2011-05-20 15:18:02: Update bell jar Message-ID: Disassembled the bell jar drive and found the ball bearing nut has been damaged. Unable to locate a spare part because vendor (applied materials) does not support this tool any more. We will try to have a new part machined. We will also try to design a system to manually lift the bell jar. From eenriquez at snf.stanford.edu Tue May 24 15:14:33 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 May 2011 15:14:33 -0700 Subject: Comment amtetcher SNF 2011-05-24 15:14:32: Up ONLY from 6am to 3:30pm Message-ID: The system is only up when etch staff is available. A manual hoist has been set up to lift and lower the bell jar. Because of safety reasons, the hoist can only be operated by staff. The replacement bearing and shaft should be here by tomorrow. The shaft still need to be machined to match the shaft from our system. If we get the system Friday morning, the tool should be ready by 4pm. From mdickey at snf.stanford.edu Wed May 25 07:41:04 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 25 May 2011 07:41:04 -0700 Subject: Shutdown amtetcher SNF 2011-05-19 14:27:04: Bell jar needs to be rebuilt Message-ID: making tool available From eenriquez at snf.stanford.edu Wed May 25 19:28:34 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 May 2011 19:28:34 -0700 Subject: Shutdown amtetcher SNF 2011-05-25 19:28:34: Need staff to operate the lift Message-ID: From mdickey at snf.stanford.edu Thu May 26 05:41:17 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 26 May 2011 05:41:17 -0700 Subject: Shutdown amtetcher SNF 2011-05-25 19:28:34: Need staff to operate the lift Message-ID: tool available From sclaussen at snf.stanford.edu Thu May 26 15:55:30 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Thu, 26 May 2011 15:55:30 -0700 Subject: Shutdown amtetcher SNF 2011-05-26 15:55:29: Bell jar does not raise/lower automatically Message-ID: From mdickey at snf.stanford.edu Fri May 27 05:34:42 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 27 May 2011 05:34:42 -0700 Subject: Shutdown amtetcher SNF 2011-05-26 15:55:29: Bell jar does not raise/lower automatically Message-ID: Tool available From zzp at snf.stanford.edu Fri May 27 18:03:36 2011 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Fri, 27 May 2011 18:03:36 -0700 Subject: Shutdown amtetcher SNF 2011-05-27 18:03:35: as per Elmer Message-ID: due to the bell lifting problem From mdickey at snf.stanford.edu Tue May 31 07:19:44 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 31 May 2011 07:19:44 -0700 Subject: Shutdown amtetcher SNF 2011-05-27 18:03:35: as per Elmer Message-ID: Making tool available