From qran at snf.stanford.edu Wed Nov 9 21:44:08 2011 From: qran at snf.stanford.edu (qran at snf.stanford.edu) Date: Wed, 9 Nov 2011 21:44:08 -0800 Subject: Comment amtetcher SNF 2011-11-09 21:44:08: break a test wafer Message-ID: replace it with a double-polished clean wafer in tray 1 slot 2. From wangss at snf.stanford.edu Wed Nov 23 21:41:31 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Wed, 23 Nov 2011 21:41:31 -0800 Subject: Problem amtetcher SNF 2011-11-23 21:41:30: vacuum wand is not working Message-ID: From eenriquez at snf.stanford.edu Fri Nov 25 11:07:19 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Nov 2011 11:07:19 -0800 Subject: Problem amtetcher SNF 2011-11-23 21:41:30: vacuum wand is not working Message-ID: Replaced missing spring. Please do not take the wand apart. From cfchiang at snf.stanford.edu Sun Nov 27 10:25:49 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Sun, 27 Nov 2011 10:25:49 -0800 Subject: Problem amtetcher SNF 2011-11-27 10:25:48: etcher is making unfamiliar noise Message-ID: From tasyurek at snf.stanford.edu Sun Nov 27 16:38:01 2011 From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu) Date: Sun, 27 Nov 2011 16:38:01 -0800 Subject: Problem amtetcher SNF 2011-11-27 16:38:00: still noisy, 'pump stack leak' error occured before etch, but then disappeared Message-ID: From tasyurek at snf.stanford.edu Sun Nov 27 17:03:06 2011 From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu) Date: Sun, 27 Nov 2011 17:03:06 -0800 Subject: Problem amtetcher SNF 2011-11-27 17:03:05: 'pump stack leak' error Message-ID: this happens during the pump down step and amt alarms but then it stops and says 'program 3 ready' and then it runs normally (with unusual noise) From tasyurek at snf.stanford.edu Sun Nov 27 17:42:30 2011 From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu) Date: Sun, 27 Nov 2011 17:42:30 -0800 Subject: Problem amtetcher SNF 2011-11-27 17:42:30: 'pump stack leak' Message-ID: further observations: before this error, there is a hissing sound (twice), then it says 'closing gate'. then the display goes dark and then it syas 'prog 3 ready' From tasyurek at snf.stanford.edu Sun Nov 27 19:01:56 2011 From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu) Date: Sun, 27 Nov 2011 19:01:56 -0800 Subject: Problem amtetcher SNF 2011-11-27 19:01:55: turbo went off Message-ID: during the etch, the turbo went off and I could hear turbo turning for 15 min or so. it did not let me vent. Please unlooad my wafer in the front (with piece mounted on it) in the storage box next to the chamber, it's labeled tasyurek. From tasyurek at snf.stanford.edu Sun Nov 27 19:06:05 2011 From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu) Date: Sun, 27 Nov 2011 19:06:05 -0800 Subject: Shutdown amtetcher SNF 2011-11-27 19:06:05: turbo went off Message-ID: see previous comments From simba85 at snf.stanford.edu Sun Nov 27 21:44:57 2011 From: simba85 at snf.stanford.edu (simba85 at snf.stanford.edu) Date: Sun, 27 Nov 2011 21:44:57 -0800 Subject: Comment amtetcher SNF 2011-11-27 21:44:56: was left #2 without disable overnight Message-ID: When I left last night, I ran #2 but missed to disable the machine. I am not sure of who used when it was being enabled. ( I will not be using it that long time again and leaving it wihtout diable). From eenriquez at snf.stanford.edu Mon Nov 28 09:06:19 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 09:06:19 -0800 Subject: Comment amtetcher SNF 2011-11-28 09:06:18: Update turbo off Message-ID: The turbo is making noise. We are in the process of replacing it. From eenriquez at snf.stanford.edu Mon Nov 28 14:50:45 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:50:45 -0800 Subject: Shutdown amtetcher SNF 2011-11-27 19:06:05: turbo went off Message-ID: Replaced the turbo pump. Ran standby recipe. From eenriquez at snf.stanford.edu Mon Nov 28 14:51:04 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:51:04 -0800 Subject: Comment amtetcher SNF 2011-11-22 11:09:05: Message-ID: From eenriquez at snf.stanford.edu Mon Nov 28 14:51:20 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:51:20 -0800 Subject: Problem amtetcher SNF 2011-11-27 10:25:48: etcher is making unfamiliar noise Message-ID: Replaced the turbo pump. Ran standby recipe. From eenriquez at snf.stanford.edu Mon Nov 28 14:51:27 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:51:27 -0800 Subject: Problem amtetcher SNF 2011-11-27 16:38:00: still noisy, 'pump stack leak' error occured before etch, but then disappeared Message-ID: Replaced the turbo pump. Ran standby recipe. From eenriquez at snf.stanford.edu Mon Nov 28 14:51:33 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:51:33 -0800 Subject: Problem amtetcher SNF 2011-11-27 17:03:05: 'pump stack leak' error Message-ID: Replaced the turbo pump. Ran standby recipe. From eenriquez at snf.stanford.edu Mon Nov 28 14:51:42 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:51:42 -0800 Subject: Problem amtetcher SNF 2011-11-27 17:42:30: 'pump stack leak' Message-ID: Replaced the turbo pump. Ran standby recipe. From eenriquez at snf.stanford.edu Mon Nov 28 14:51:48 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:51:48 -0800 Subject: Problem amtetcher SNF 2011-11-27 19:01:55: turbo went off Message-ID: Replaced the turbo pump. Ran standby recipe. From eenriquez at snf.stanford.edu Mon Nov 28 14:52:09 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:52:09 -0800 Subject: Comment amtetcher SNF 2011-11-27 21:44:56: was left #2 without disable overnight Message-ID: Archived From eenriquez at snf.stanford.edu Mon Nov 28 14:52:17 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:52:17 -0800 Subject: Comment amtetcher SNF 2011-11-28 09:06:18: Update turbo off Message-ID: Replaced the turbo pump. Ran standby recipe. From eenriquez at snf.stanford.edu Mon Nov 28 14:52:29 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:52:29 -0800 Subject: Comment amtetcher SNF 2011-11-09 21:44:08: break a test wafer Message-ID: Archived From eenriquez at snf.stanford.edu Mon Nov 28 14:54:25 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 14:54:25 -0800 Subject: Comment amtetcher SNF 2011-10-31 16:25:05: previous user forgot to put in dummy wafer Message-ID: Archived From tasyurek at snf.stanford.edu Mon Nov 28 18:54:08 2011 From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu) Date: Mon, 28 Nov 2011 18:54:08 -0800 Subject: Comment amtetcher SNF 2011-11-28 18:54:08: flaking Message-ID: the orange substance (polymer buildup?) at the bottom part of hexode(assuming that's what it is called) is flaking.