From eenriquez at snf.stanford.edu Wed Oct 5 16:12:06 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Oct 2011 16:12:06 -0700 Subject: Problem amtetcher SNF 2011-09-02 15:03:52: NF3 bottle almost empty! Message-ID: Replaced NF3 cylinder. Changed the Standby recipe (#2) back to standard settings. Needs a process qual. From eenriquez at snf.stanford.edu Wed Oct 5 16:12:18 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Oct 2011 16:12:18 -0700 Subject: Comment amtetcher SNF 2011-09-02 14:25:29: Modified recipe2 (standby recipe) Message-ID: Changed the Standby recipe (#2) back to standard settings From eenriquez at snf.stanford.edu Thu Oct 6 07:53:25 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 6 Oct 2011 07:53:25 -0700 Subject: Problem amtetcher SNF 2011-10-06 07:53:25: Needs NF3 process qual Message-ID: From latta at snf.stanford.edu Thu Oct 6 15:25:18 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 6 Oct 2011 15:25:18 -0700 Subject: Comment amtetcher SNF 2011-08-05 16:48:04: Oxide Etch Program tested (prog #3) Message-ID: newer rates posted From latta at snf.stanford.edu Thu Oct 6 15:25:28 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 6 Oct 2011 15:25:28 -0700 Subject: Comment amtetcher SNF 2011-08-05 16:49:03: Resist burnt Message-ID: archived From latta at snf.stanford.edu Thu Oct 6 15:25:45 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 6 Oct 2011 15:25:45 -0700 Subject: Comment amtetcher SNF 2011-09-10 14:49:56: Oxide etch rate Message-ID: newer rates posted From latta at snf.stanford.edu Thu Oct 6 15:26:06 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 6 Oct 2011 15:26:06 -0700 Subject: Problem amtetcher SNF 2011-10-06 07:53:25: Needs NF3 process qual Message-ID: done- results posted From latta at snf.stanford.edu Thu Oct 6 15:28:59 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 6 Oct 2011 15:28:59 -0700 Subject: Comment amtetcher SNF 2011-10-06 15:28:59: Prog#1 etch rate check after NF3 replacement Message-ID: Prog#1, 2 mins Si ER = 352A/min PR ER = 249A/min From amroy at snf.stanford.edu Thu Oct 13 21:47:24 2011 From: amroy at snf.stanford.edu (amroy at snf.stanford.edu) Date: Thu, 13 Oct 2011 21:47:24 -0700 Subject: Problem amtetcher SNF 2011-10-13 21:47:23: Problem with Standby program 2 Message-ID: The program has changed somehow and I tried my best to change it back to the program specified in the manual but I am not sure I was able to do it right. I will try to check it again tomorrow morning but it would be great if a more experienced user could take a look. From eenriquez at snf.stanford.edu Fri Oct 14 11:29:42 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 14 Oct 2011 11:29:42 -0700 Subject: Problem amtetcher SNF 2011-10-13 21:47:23: Problem with Standby program 2 Message-ID: Fixed the standby recipe From mdickey at snf.stanford.edu Wed Oct 26 05:23:36 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 26 Oct 2011 05:23:36 -0700 Subject: Shutdown amtetcher SNF 2011-10-26 05:23:35: water Message-ID: Down for flow meter tie in From mdickey at snf.stanford.edu Wed Oct 26 09:24:21 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 26 Oct 2011 09:24:21 -0700 Subject: Shutdown amtetcher SNF 2011-10-26 05:23:35: water Message-ID: tie in done. Ran recipe 2 with no problems From mislam at snf.stanford.edu Sun Oct 30 17:51:37 2011 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sun, 30 Oct 2011 17:51:37 -0700 Subject: Problem amtetcher SNF 2011-10-30 17:51:37: arc/burn marks on tray#1 Message-ID: Open chamber and found bad arcing marks on back of tray#1. Tray won't latch in place. Not safe to run even standby recipe. Left chamber vented. From mdickey at snf.stanford.edu Mon Oct 31 08:23:53 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 31 Oct 2011 08:23:53 -0700 Subject: Problem amtetcher SNF 2011-10-30 17:51:37: arc/burn marks on tray#1 Message-ID: Cleaned up arc marks and replaced burnt ardels. Running recipe 2 From jpmailoa at snf.stanford.edu Mon Oct 31 16:25:05 2011 From: jpmailoa at snf.stanford.edu (jpmailoa at snf.stanford.edu) Date: Mon, 31 Oct 2011 16:25:05 -0700 Subject: Comment amtetcher SNF 2011-10-31 16:25:05: previous user forgot to put in dummy wafer Message-ID: On the first hex, the top and bottom spots were not covered by dummy wafer and were etched with recipe 2 by the time I started the machine. Not sure if having those spots directly etched by recipe 2 can have negative effect on the machine or not.