Comment amtetcher SNF 2011-10-06 15:28:59: Prog#1 etch rate check after NF3 replacement

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Oct 6 15:28:59 PDT 2011


Prog#1, 2 mins
Si ER = 352A/min
PR ER = 249A/min




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