From eenriquez at snf.stanford.edu Fri Sep 2 14:20:08 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 2 Sep 2011 14:20:08 -0700 Subject: Comment amtetcher SNF 2011-08-15 10:29:27: Completed monthly PM Message-ID: Archieved From eenriquez at snf.stanford.edu Fri Sep 2 14:25:29 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 2 Sep 2011 14:25:29 -0700 Subject: Comment amtetcher SNF 2011-09-02 14:25:29: Modified recipe2 (standby recipe) Message-ID: Modified the recipe 2 to conserve NF3. NF3 cylinder pressure is very low (<100 psi). New cylinder will be here in 3 - 5 weeks. We are trying to expedite it. From latta at snf.stanford.edu Fri Sep 2 15:03:53 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Sep 2011 15:03:53 -0700 Subject: Problem amtetcher SNF 2011-09-02 15:03:52: NF3 bottle almost empty! Message-ID: Do not run reciipes that use NF3. For example, Prog#1. From quickwin at snf.stanford.edu Sat Sep 10 09:38:47 2011 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Sat, 10 Sep 2011 09:38:47 -0700 Subject: Problem amtetcher SNF 2011-09-10 09:38:46: Process 2 uses NF3 bottle too- consequences Message-ID: Yesterday my etch rate was low - around 245A/min. I wonder if this is caused by the excessive buildup of polymer in the chamber. NF3 is a necessary gas for process 2, the chamber cleaning recipe. Now that NF3 is low, process 2 is probably affected, therefore the efficiency of polymer removal. From ysohn at snf.stanford.edu Sat Sep 10 14:49:57 2011 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Sat, 10 Sep 2011 14:49:57 -0700 Subject: Comment amtetcher SNF 2011-09-10 14:49:56: Oxide etch rate Message-ID: I measured the thermal oxide etch rate from the concern of the previous user, and found that etch rate was 360 A / min, which is quite normal. From latta at snf.stanford.edu Tue Sep 13 14:44:02 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Sep 2011 14:44:02 -0700 Subject: Problem amtetcher SNF 2011-09-10 09:38:46: Process 2 uses NF3 bottle too- consequences Message-ID: talked with user. He was running a very long etch without polymer removal and got very uneven etching. Advised him to descum every 15-20 mins during the etch. Also ran a ER check. Results posted in comments. From latta at snf.stanford.edu Tue Sep 13 14:45:51 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Sep 2011 14:45:51 -0700 Subject: Comment amtetcher SNF 2011-09-13 14:45:50: Prog #3 ER check Message-ID: Ran Std oxide etch for 2 mins Thermal ox ER = 347A/min From ysohn at snf.stanford.edu Sun Sep 18 09:13:45 2011 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Sun, 18 Sep 2011 09:13:45 -0700 Subject: Problem amtetcher SNF 2011-09-18 09:13:44: vacuum wand tip Message-ID: very loose and rotates From wangss at snf.stanford.edu Sun Sep 18 19:08:16 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Sun, 18 Sep 2011 19:08:16 -0700 Subject: Problem amtetcher SNF 2011-09-18 19:08:16: Vacuum Wand is broken Message-ID: The piece of quartz on the tip of the wand fell on the floor and broke into two pieces while loading wafers. Left the quartz pieces in the glove by the loading cassette. From mdickey at snf.stanford.edu Tue Sep 20 06:58:00 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 20 Sep 2011 06:58:00 -0700 Subject: Problem amtetcher SNF 2011-09-18 19:08:16: Vacuum Wand is broken Message-ID: Replaced wand tip From eenriquez at snf.stanford.edu Tue Sep 20 09:29:40 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Sep 2011 09:29:40 -0700 Subject: Problem amtetcher SNF 2011-09-18 09:13:44: vacuum wand tip Message-ID: Vacuum wand tip has been replaced. From lupin000 at snf.stanford.edu Tue Sep 27 01:39:03 2011 From: lupin000 at snf.stanford.edu (lupin000 at snf.stanford.edu) Date: Tue, 27 Sep 2011 01:39:03 -0700 Subject: Problem amtetcher SNF 2011-09-27 01:39:02: Replace a broken dummy wafer to a new dummy wafer Message-ID: I replaced a broken dummy wafer(not in the chamber) to a new dummy wafer. The replaced one is from "Lampoly dummies" cassette and this one is belonged to clean status. By the way, is there anybody who knows a dummy wafer only for amtetcher? From eenriquez at snf.stanford.edu Wed Sep 28 10:24:04 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Sep 2011 10:24:04 -0700 Subject: Problem amtetcher SNF 2011-09-27 01:39:02: Replace a broken dummy wafer to a new dummy wafer Message-ID: Thanks. From latta at snf.stanford.edu Wed Sep 28 14:11:20 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Sep 2011 14:11:20 -0700 Subject: Comment amtetcher SNF 2011-09-28 14:11:19: Replaced dummy wafers. Message-ID: