Comment amtetcher SNF 2011-09-10 14:49:56: Oxide etch rate

ysohn at snf.stanford.edu ysohn at snf.stanford.edu
Sat Sep 10 14:49:57 PDT 2011


I measured the thermal oxide etch rate from the concern of the previous user, and found that etch rate was 360 A / min, which is quite normal.




More information about the amtetcher-pcs mailing list