Problem amtetcher SNF 2011-09-10 09:38:46: Process 2 uses NF3 bottle too- consequences

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Sep 13 14:44:02 PDT 2011


talked with user.  He was running a very long etch without polymer removal and got very uneven etching.  Advised him to descum every 15-20 mins during the etch.
Also ran a ER check.  Results posted in comments.




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