Problem amtetcher SNF 2011-09-10 09:38:46: Process 2 uses NF3 bottle too- consequences

[latta at snf.stanford.edu]

talked with user.  He was running a very long etch without polymer removal and got very uneven etching.  Advised him to descum every 15-20 mins during the etch.
Also ran a ER check.  Results posted in comments.