Problem amtetcher SNF 2011-09-18 19:08:16: Vacuum Wand is broken
mdickey at snf.stanford.edu
mdickey at snf.stanford.edu
Tue Sep 20 06:58:00 PDT 2011
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Problem amtetcher SNF 2011-09-18 19:08:16: Vacuum Wand is broken
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Problem amtetcher SNF 2011-09-27 01:39:02: Replace a broken dummy wafer to a new dummy wafer
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Replaced wand tip
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Problem amtetcher SNF 2011-09-18 19:08:16: Vacuum Wand is broken
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Problem amtetcher SNF 2011-09-27 01:39:02: Replace a broken dummy wafer to a new dummy wafer
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