Problem amtetcher SNF 2011-09-27 01:39:02: Replace a broken dummy wafer to a new dummy wafer

lupin000 at lupin000 at
Tue Sep 27 01:39:03 PDT 2011

I replaced a broken dummy wafer(not in the chamber) to a new dummy wafer. The replaced one is from "Lampoly dummies" cassette and this one is belonged to clean status. By the way, is there anybody who knows a dummy wafer only for amtetcher?

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