Problem amtetcher SNF 2011-09-27 01:39:02: Replace a broken dummy wafer to a new dummy wafer

[lupin000 at snf.stanford.edu]

I replaced a broken dummy wafer(not in the chamber) to a new dummy wafer. The replaced one is from "Lampoly dummies" cassette and this one is belonged to clean status. By the way, is there anybody who knows a dummy wafer only for amtetcher?