From junam at snf.stanford.edu Thu Apr 12 23:03:27 2012 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Thu, 12 Apr 2012 23:03:27 -0700 Subject: Problem amtetcher SNF 2012-04-12 23:03:27: power outage: samples stuck Message-ID: Recipe # 3 was being used. Right after the etch was completed, and before the chamber was vented, the system got turned off (maybe due to the short power outage), and my samples got stuck inside the etcher. Please call me at: 650-804-9128, before opening the system. From eenriquez at snf.stanford.edu Fri Apr 13 07:50:28 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Apr 2012 07:50:28 -0700 Subject: Problem amtetcher SNF 2012-04-12 23:03:27: power outage: samples stuck Message-ID: Mike unloaded the wafer and verified system constants. From cachang at snf.stanford.edu Thu Apr 19 21:15:25 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Thu, 19 Apr 2012 21:15:25 -0700 Subject: Problem amtetcher SNF 2012-04-19 21:15:25: Cooling Hex? Message-ID: When I tried to run process 3, the machine was stuck at this step for longer than 20mins. I aborted it, and ran process 2. It was still at this step. From cbaxter at snf.stanford.edu Thu Apr 19 21:50:10 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 19 Apr 2012 21:50:10 -0700 Subject: Problem amtetcher SNF 2012-04-19 21:15:25: Cooling Hex? Message-ID: Reset breaker for heat exchanger cooling pump and refilled reservior. Will ran recipe#3 and monitor cooling hex temp. From cachang at snf.stanford.edu Fri Apr 20 10:54:06 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Fri, 20 Apr 2012 10:54:06 -0700 Subject: Problem amtetcher SNF 2012-04-20 10:54:03: Cooling Hex problem? Message-ID: The cooling hex problem appears again. When I tried to run process 3, machine stopped at cooling hex step for longer than 10mins. From cachang at snf.stanford.edu Fri Apr 20 11:09:03 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Fri, 20 Apr 2012 11:09:03 -0700 Subject: Comment amtetcher SNF 2012-04-20 11:09:03: Cooling Hex Message-ID: I aborted process 3, and ran process 2. It can pass through this step. I am running process 3 with no problem. From cachang at snf.stanford.edu Fri Apr 20 11:50:31 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Fri, 20 Apr 2012 11:50:31 -0700 Subject: Comment amtetcher SNF 2012-04-20 11:50:30: Update: cooling hex Message-ID: After seasoning and putting my wafers in, the machine took about 10mins to pass through the cooling hex step, which was still a long time. From cbaxter at snf.stanford.edu Sun Apr 22 20:24:41 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 22 Apr 2012 20:24:41 -0700 Subject: Comment amtetcher SNF 2012-04-22 20:24:40: Cooling Hex Message-ID: The cooling hex setpoint is 22C, it take about 8 to 10 mins to reached the setpoint, tool still ok to use. Will continue to troubleshoot... From cbaxter at snf.stanford.edu Sun Apr 22 20:28:33 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 22 Apr 2012 20:28:33 -0700 Subject: Problem amtetcher SNF 2012-04-20 10:54:03: Cooling Hex problem? Message-ID: From latta at snf.stanford.edu Tue Apr 24 11:57:57 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 24 Apr 2012 11:57:57 -0700 Subject: Problem amtetcher SNF 2012-04-24 11:57:56: Took 16 mins to cool hex Message-ID: The ;ast 9 mins were at 23C- switch issue? From cbaxter at snf.stanford.edu Tue Apr 24 17:24:39 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 24 Apr 2012 17:24:39 -0700 Subject: Comment amtetcher SNF 2012-04-24 17:24:38: Cooling hex update Message-ID: The tool still ok to use, will continue to troubleshoot the cooling hex problem.. From carterlin at snf.stanford.edu Wed Apr 25 14:52:51 2012 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Wed, 25 Apr 2012 14:52:51 -0700 Subject: Problem amtetcher SNF 2012-04-25 14:52:50: Long time to cool the hex Message-ID: It took >25 min to cool the hex. I abort my process From eenriquez at snf.stanford.edu Thu Apr 26 09:35:56 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Apr 2012 09:35:56 -0700 Subject: Shutdown amtetcher SNF 2012-04-26 09:35:56: heat exchanger problem Message-ID: The cool loop is not cooling From eenriquez at snf.stanford.edu Thu Apr 26 14:51:40 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Apr 2012 14:51:40 -0700 Subject: Shutdown amtetcher SNF 2012-04-26 09:35:56: heat exchanger problem Message-ID: Heat exchanger had a leak. Repaired broken water line. Still having problems with the long cool down. From eenriquez at snf.stanford.edu Fri Apr 27 09:02:11 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Apr 2012 09:02:11 -0700 Subject: Problem amtetcher SNF 2012-04-24 11:57:56: Took 16 mins to cool hex Message-ID: Disabled the temperature switching. So instead of the hexode warming up to 30 C when the chamber is vented, it remains at 23 C. From eenriquez at snf.stanford.edu Fri Apr 27 09:02:16 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Apr 2012 09:02:16 -0700 Subject: Problem amtetcher SNF 2012-04-25 14:52:50: Long time to cool the hex Message-ID: Disabled the temperature switching. So instead of the hexode warming up to 30 C when the chamber is vented, it remains at 23 C. From eenriquez at snf.stanford.edu Fri Apr 27 09:02:29 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Apr 2012 09:02:29 -0700 Subject: Comment amtetcher SNF 2012-04-24 17:24:38: Cooling hex update Message-ID: Archived From eenriquez at snf.stanford.edu Fri Apr 27 09:02:43 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Apr 2012 09:02:43 -0700 Subject: Comment amtetcher SNF 2012-04-22 20:24:40: Cooling Hex Message-ID: Archived From eenriquez at snf.stanford.edu Fri Apr 27 09:02:55 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Apr 2012 09:02:55 -0700 Subject: Comment amtetcher SNF 2012-04-20 11:09:03: Cooling Hex Message-ID: Disabled the temperature switching. So instead of the hexode warming up to 30 C when the chamber is vented, it remains at 23 C. From eenriquez at snf.stanford.edu Fri Apr 27 09:03:05 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Apr 2012 09:03:05 -0700 Subject: Comment amtetcher SNF 2012-04-20 11:50:30: Update: cooling hex Message-ID: Disabled the temperature switching. So instead of the hexode warming up to 30 C when the chamber is vented, it remains at 23 C. From eenriquez at snf.stanford.edu Fri Apr 27 09:03:35 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Apr 2012 09:03:35 -0700 Subject: Comment amtetcher SNF 2012-04-27 09:03:34: Hexode temperature Message-ID: Disabled the temperature switching. So instead of the hexode warming up to 30 C when the chamber is vented, it remains at 23 C. From latta at snf.stanford.edu Fri Apr 27 14:51:52 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 27 Apr 2012 14:51:52 -0700 Subject: Comment amtetcher SNF 2012-04-27 14:51:51: Quick check after warm loop turned off Message-ID: Prog#3 for 00:02:00 Thermal oxide ER = 371A/min Feb qual was 321A/min Please check etch rates for your samples.