Problem amtetcher SNF 2012-04-12 23:03:27: power outage: samples stuck

junam at snf.stanford.edu junam at snf.stanford.edu
Thu Apr 12 23:03:27 PDT 2012


Recipe # 3 was being used. Right after the etch was completed, and before the chamber was vented, the system got turned off (maybe due to the short power outage), and my samples got stuck inside the etcher. Please call me at: 650-804-9128, before opening the system.




More information about the amtetcher-pcs mailing list