Comment amtetcher SNF 2012-04-27 14:51:51: Quick check after warm loop turned off

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Apr 27 14:51:52 PDT 2012


Prog#3 for 00:02:00
Thermal oxide ER = 371A/min
Feb qual was 321A/min
Please check etch rates for your samples.




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