From eenriquez at snf.stanford.edu Tue Feb 7 12:03:39 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Feb 2012 12:03:39 -0800 Subject: Shutdown amtetcher SNF 2011-12-13 14:39:41: Scheduled shutdown Message-ID: System has been restarted. All gases are on. From eenriquez at snf.stanford.edu Tue Feb 7 12:04:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Feb 2012 12:04:54 -0800 Subject: Problem amtetcher SNF 2012-02-07 12:04:54: Needs process qualification Message-ID: Completed monthly PM. Needs process checks. From eenriquez at snf.stanford.edu Wed Feb 8 07:49:05 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Feb 2012 07:49:05 -0800 Subject: Shutdown amtetcher SNF 2012-02-08 07:49:04: Facility work Message-ID: From latta at snf.stanford.edu Thu Feb 9 11:26:49 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 9 Feb 2012 11:26:49 -0800 Subject: Comment amtetcher SNF 2012-02-09 11:26:48: Swapped out dummies Message-ID: Run prog#2 to clean From eenriquez at snf.stanford.edu Tue Feb 14 11:16:09 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Feb 2012 11:16:09 -0800 Subject: Shutdown amtetcher SNF 2012-02-08 07:49:04: Facility work Message-ID: Facility work completed From latta at snf.stanford.edu Tue Feb 14 18:16:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 18:16:24 -0800 Subject: Problem amtetcher SNF 2012-02-07 12:04:54: Needs process qualification Message-ID: qual almost completed (needs single crystal Si) and [posted on wiki and coral comments From latta at snf.stanford.edu Tue Feb 14 18:16:46 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 18:16:46 -0800 Subject: Comment amtetcher SNF 2011-09-13 14:45:50: Prog #3 ER check Message-ID: newer quals posted From latta at snf.stanford.edu Tue Feb 14 18:21:42 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 18:21:42 -0800 Subject: Comment amtetcher SNF 2012-02-14 18:21:41: Quals after annual shutdown and renovation Message-ID: Program #3, 2 mins (10 min for PR) Thermal oxide = 321A/min 3612 PR = 79A/min LTO undensified = 289A/min SiN = 245A/min Sel Tox : PR = 4.1 : 1 Sel SiN : PR = 3.1 : 1 Tray to tray results can be found on the wiki. From latta at snf.stanford.edu Fri Feb 17 10:30:02 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 17 Feb 2012 10:30:02 -0800 Subject: Problem amtetcher SNF 2012-02-17 10:30:01: no turbo water error Message-ID: From eenriquez at snf.stanford.edu Fri Feb 17 15:05:48 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Feb 2012 15:05:48 -0800 Subject: Problem amtetcher SNF 2012-02-17 10:30:01: no turbo water error Message-ID: System recovered From popomoo at snf.stanford.edu Sun Feb 19 14:40:36 2012 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Sun, 19 Feb 2012 14:40:36 -0800 Subject: Shutdown amtetcher SNF 2012-02-19 14:40:36: Turbo went off Message-ID: I came here, but it said 'turbo went off'. From eenriquez at snf.stanford.edu Tue Feb 21 11:06:43 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Feb 2012 11:06:43 -0800 Subject: Shutdown amtetcher SNF 2012-02-19 14:40:36: Turbo went off Message-ID: Restarted the turbo ran the standby recipe with no problems. From latta at snf.stanford.edu Wed Feb 22 11:53:44 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 22 Feb 2012 11:53:44 -0800 Subject: Comment amtetcher SNF 2012-02-09 11:26:48: Swapped out dummies Message-ID: archived From latta at snf.stanford.edu Wed Feb 22 11:54:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 22 Feb 2012 11:54:54 -0800 Subject: Comment amtetcher SNF 2011-08-05 16:44:20: ASML target program tested (Prog #4) Message-ID: archived