Comment amtetcher SNF 2012-02-14 18:21:41: Quals after annual shutdown and renovation

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Feb 14 18:21:42 PST 2012


Program #3, 2 mins (10 min for PR)
Thermal oxide = 321A/min
3612 PR = 79A/min
LTO undensified = 289A/min
SiN = 245A/min
Sel Tox : PR = 4.1 : 1
Sel SiN : PR = 3.1 : 1
Tray to tray results can be found on the wiki.




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