From mdickey at snf.stanford.edu  Tue Jun  5 09:50:58 2012
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 5 Jun 2012 09:50:58 -0700
Subject: Comment amtetcher SNF 2012-06-05 09:50:58: tray support
Message-ID: <mailman.2863.1357938249.25670.amtetcher-pcs@snf.stanford.edu>

Replaced all 6 ardel tray supports



From cechang at snf.stanford.edu  Mon Jun 18 10:42:54 2012
From: cechang at snf.stanford.edu (cechang at snf.stanford.edu)
Date: Mon, 18 Jun 2012 10:42:54 -0700
Subject: Shutdown amtetcher SNF 2012-06-18 10:42:53: front panel stuck
Message-ID: <mailman.2864.1357938249.25670.amtetcher-pcs@snf.stanford.edu>

I finished etching, unloaded my wafers, and tried to close the jar. But the front panel suddenly stopped responding. Now the jar is wide only.



From cechang at snf.stanford.edu  Mon Jun 18 10:45:47 2012
From: cechang at snf.stanford.edu (cechang at snf.stanford.edu)
Date: Mon, 18 Jun 2012 10:45:47 -0700
Subject: Comment amtetcher SNF 2012-06-18 10:45:47: typo
Message-ID: <mailman.2865.1357938249.25670.amtetcher-pcs@snf.stanford.edu>

I meant "wide open."



From eenriquez at snf.stanford.edu  Mon Jun 18 13:41:11 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 18 Jun 2012 13:41:11 -0700
Subject: Shutdown amtetcher SNF 2012-06-18 10:42:53: front panel stuck
Message-ID: <mailman.2866.1357938249.25670.amtetcher-pcs@snf.stanford.edu>

The software was locked up.  Rebooted the system and ran the standby recipe.



From eenriquez at snf.stanford.edu  Mon Jun 18 13:41:19 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 18 Jun 2012 13:41:19 -0700
Subject: Comment amtetcher SNF 2012-06-18 10:45:47: typo
Message-ID: <mailman.2867.1357938249.25670.amtetcher-pcs@snf.stanford.edu>

Archived



From xuanwu at snf.stanford.edu  Sun Jun 24 15:04:11 2012
From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu)
Date: Sun, 24 Jun 2012 15:04:11 -0700
Subject: Problem amtetcher SNF 2012-06-24 15:04:11: Vacuum wand needs fixing
Message-ID: <mailman.2868.1357938249.25670.amtetcher-pcs@snf.stanford.edu>

The little button on the side of the vacuum wand is missing.  Had to plug the hole with my finger while using it.



From mdickey at snf.stanford.edu  Mon Jun 25 06:58:06 2012
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 25 Jun 2012 06:58:06 -0700
Subject: Problem amtetcher SNF 2012-06-24 15:04:11: Vacuum wand needs fixing
Message-ID: <mailman.2869.1357938249.25670.amtetcher-pcs@snf.stanford.edu>

Wand replaced



From jparker at snf.stanford.edu  Fri Jun 29 23:50:49 2012
From: jparker at snf.stanford.edu (jparker at snf.stanford.edu)
Date: Fri, 29 Jun 2012 23:50:49 -0700
Subject: Comment amtetcher SNF 2012-06-29 23:50:49: #3 SiO2 rate 290Ang/min
Message-ID: <mailman.2870.1357938249.25670.amtetcher-pcs@snf.stanford.edu>

For the curious, thermal SiO2 etched at 290 Ang/min for a 7min etch today.