From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 14, 2000 Subject: Shutdown amtetcher: tray #6 arced at latch Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 14, 2000 Subject: Shutdown Clear amtetcher: cleaned arc mark om tray. Message-ID: From frankliu at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: frankliu at snf.stanford.edu (frankliu at snf.stanford.edu) Date: Apr 17, 2000 Subject: Problem amtetcher: Turbo went off. Display lists as not ready, instead of holding at process #2. I silenced the alarm. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 18, 2000 Subject: Problem Clear amtetcher: restarted turbo pump. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 26, 2000 Subject: Shutdown amtetcher: temporary shutdown - back by mid-morning. Len Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 26, 2000 Subject: Shutdown Clear amtetcher: Message-ID: From pcastle at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: pcastle at snf.stanford.edu (pcastle at snf.stanford.edu) Date: Apr 27, 2000 Subject: Shutdown amtetcher: maintenence Message-ID: by len From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 27, 2000 Subject: Shutdown Clear amtetcher: brought back the RF supply relay. Message-ID: From crozier at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: crozier at snf.stanford.edu (crozier at snf.stanford.edu) Date: May 3, 2000 Subject: Problem amtetcher: Message-ID: Noticed that one of the clips for the bottom wafer on tray 2 is broken. From crozier at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: crozier at snf.stanford.edu (crozier at snf.stanford.edu) Date: May 3, 2000 Subject: Problem amtetcher: tray2 bottom wafer - clip broken Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 3, 2000 Subject: Shutdown amtetcher: need to replace clip's on tray Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 3, 2000 Subject: Shutdown Clear amtetcher: changed tray#2 bottom clip Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 3, 2000 Subject: Problem Clear amtetcher: Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 3, 2000 Subject: Problem Clear amtetcher: Message-ID: From sanli at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Jun 8, 2000 Subject: Problem amtetcher: Awful sound while tray is rotating Message-ID: It even stopped once while jogging all the way back as if it is having difficulty in rotating the tray From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 8, 2000 Subject: Shutdown amtetcher: Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 8, 2000 Subject: Shutdown Clear amtetcher: Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 8, 2000 Subject: Problem Clear amtetcher: don't it will cause any problem. i jog the hex cw and ccw , it make that very lite chattering when hex is returning at home position. it look like gear drive need to lube on next wet clean pm. Message-ID: From phimmer at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: phimmer at snf.stanford.edu (phimmer at snf.stanford.edu) Date: Jun 10, 2000 Subject: Problem amtetcher: wafer clip broke bottom spot 1st panal Message-ID: From sanli at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Jun 11, 2000 Subject: Problem amtetcher: Please fix this ASAP. I need it badly. Message-ID: One of the wafer clips at the bottom of the first tray is broken. It still holds the wafer, but I did not do a run. I tried to do a seasoning. Everything seemed OK, but the plasma was flashing, and there was a clicking sound heard occasionaly. I decided not to do an actual run. From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 12, 2000 Subject: Shutdown amtetcher: Tray#1 wafer clip is broken off. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 12, 2000 Subject: Shutdown Clear amtetcher: replaced wafer clip on tray# 1 D. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 12, 2000 Subject: Problem Clear amtetcher: cleared. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 12, 2000 Subject: Problem Clear amtetcher: cleared. Message-ID: From beckwith at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Jun 27, 2000 Subject: Shutdown amtetcher: Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jun 27, 2000 Subject: Shutdown amtetcher: Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jun 27, 2000 Subject: Shutdown Clear amtetcher: Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jun 27, 2000 Subject: Shutdown Clear amtetcher: Message-ID: From beckwith at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Jul 14, 2000 Subject: Problem amtetcher: vacuum leak, use tweezers to load & unload your wafers until it is repaired. Message-ID: From beckwith at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Jul 14, 2000 Subject: Problem amtetcher: hex clicks when rotating, sometimes does not seat properly & alarms. Message-ID: From beckwith at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Jul 14, 2000 Subject: Problem amtetcher: hex makes clicking noise while rotating, sometimes does not seat properly causing the alram to sound. Message-ID: From beckwith at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Jul 14, 2000 Subject: Problem amtetcher: mfc to gas 3 needs to be zeroed, drifts & get a RO of 1 sometimes. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 14, 2000 Subject: Problem Clear amtetcher: replaced quartz wand tip, fixed vac hose. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 14, 2000 Subject: Problem Clear amtetcher: Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 14, 2000 Subject: Problem Clear amtetcher: Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 14, 2000 Subject: Problem Clear amtetcher: low priority. Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 18, 2000 Subject: Shutdown amtetcher: Water Leak in basement Message-ID: Water is leaking out of the main chilled water inlet valve in the basement. From mcvittie at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Aug 18, 2000 Subject: Shutdown Clear amtetcher: MikeR put in new H2O reg in cooling sys. Jim Message-ID: From hopcroft at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu) Date: Aug 23, 2000 Subject: Problem amtetcher: hexode motor sticking Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 24, 2000 Subject: Problem Clear amtetcher: known problem - press the jog button again. Message-ID: From price at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: price at snf.stanford.edu (price at snf.stanford.edu) Date: Aug 24, 2000 Subject: Problem amtetcher: cold loop at 34c Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 24, 2000 Subject: Problem Clear amtetcher: checked that cold loop set= 19C. Message-ID: From hopcroft at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu) Date: Aug 31, 2000 Subject: Shutdown amtetcher: hex won't turn Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 1, 2000 Subject: Shutdown Clear amtetcher: limited use- tray one only. Message-ID: From price at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: price at snf.stanford.edu (price at snf.stanford.edu) Date: Sep 1, 2000 Subject: Shutdown amtetcher: Hex will not rotate Message-ID: From anolley at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: anolley at snf.stanford.edu (anolley at snf.stanford.edu) Date: Sep 19, 2000 Subject: Shutdown amtetcher: Cryo Pump Message-ID: Cryo pump not working. Equipment not functional. From mcvittie at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sep 26, 2000 Subject: Shutdown Clear amtetcher: Ok to run w/o cryo pump. Needed longer pumpdw. 12 min Message-ID: From mcvittie at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sep 26, 2000 Subject: Problem amtetcher: Cryo pump still off. Needed longer pumpdw Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 4, 2000 Subject: Shutdown amtetcher: Leak in foreline bellows. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 4, 2000 Subject: Shutdown Clear amtetcher: replaced foreline bellows & reouted. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 4, 2000 Subject: Problem Clear amtetcher: cleaned cryo purge valve & it leak checked OK. Message-ID: From xuanwu at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-08-17 15:12:03: strange error message Message-ID: <5774075.146.1345241523858.JavaMail.coral@shine> "FL SNS ALWAYS ON FIX OR PUSH RUN" I have 9 wafers in there in the middle of process 4 (time=5.4 min), but I'm not sure where in the etch the power was interrupted. Please e-mail me if you know what the error message means and how to deal with it. Please put wafers in wafer box on top of the machine if you manage to get them out. Thanks. From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-08-17 16:24:18: no cooling water Message-ID: <28604196.163.1345245859577.JavaMail.coral@shine> From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-08-17 16:24:18: no cooling water Message-ID: <7077011.189.1345250595487.JavaMail.coral@shine> System back to normal operation.. From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-08-17 15:12:03: strange error message Message-ID: <7865009.190.1345250624776.JavaMail.coral@shine> From jaehlee at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-08-26 00:14:00: hexode 21 deg c+ ? Message-ID: <25194288.177.1345965240622.JavaMail.coral@shine> All the tool seems to be normal except "hexode ..." sign is on the screen. What is this? From jaehlee at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-08-26 00:36:41: please ignore my previous report for the problem Message-ID: <16603726.178.1345966602572.JavaMail.coral@shine> it's just a reading for the temperature. Someone might press the temperature button. From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-08-26 00:14:00: hexode 21 deg c+ ? Message-ID: <5048333.2.1346037006174.JavaMail.coral@shine> From maxms at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-09-02 10:37:15: broken Message-ID: <15169271.0.1346607436574.JavaMail.coral@shine> system says ready to vent, but all of the buttons/ front panel looks like the lights are out and can't press any of them From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-09-02 18:14:01: Update Message-ID: <19016590.1.1346634842017.JavaMail.coral@shine> System locked up and it won't boot up, troubleshooting in progress... From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-09-04 14:25:06: Update Message-ID: <191079.24.1346793906930.JavaMail.coral@shine> The power supply board is defective. Need to replace or repair. From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-09-05 12:18:04: Update Message-ID: <9609880.39.1346872685917.JavaMail.coral@shine> We are sending the bad board out for repair today. It should be back in 4 to 5 days. From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-09-11 12:09:40: Update Message-ID: <32468368.78.1347390581541.JavaMail.coral@shine> Repaired board should be here tomorrow by 3 pm. From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-09-02 18:14:01: Update Message-ID: <12316706.113.1347487361535.JavaMail.coral@shine> Replaced power supply board. Reprogrammend system constants and recipes. Ran recipe 3 and 2 with no problems. From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-09-02 10:37:15: broken Message-ID: <5436133.114.1347487383554.JavaMail.coral@shine> Replaced power supply board. Reprogrammend system constants and recipes. Ran recipe 3 and 2 with no problems. From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-08-01 08:41:45: oil Message-ID: <16369394.115.1347487419563.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-08-26 00:36:41: please ignore my previous report for the problem Message-ID: <19116358.116.1347487429571.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-09-04 14:25:06: Update Message-ID: <28162305.117.1347487438579.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-09-05 12:18:04: Update Message-ID: <25117552.118.1347487443586.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-09-11 12:09:40: Update Message-ID: <9558669.119.1347487448595.JavaMail.coral@shine> Archived From chienyuc at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-09-13 09:36:50: Process Error Message-ID: <6589284.137.1347554210415.JavaMail.coral@shine> Running process 3 but interrupt during the main etch step. Error RS 1FFE FF FF C3. System freezes. From mdickey at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-09-13 09:56:09: shutdown Message-ID: <2647335.138.1347555369785.JavaMail.coral@shine> Need to troubleshoot From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-09-13 09:56:09: shutdown Message-ID: <3050366.152.1347573671463.JavaMail.coral@shine> Replaced the ADDR board (address). Ran recipe 2 From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-09-13 09:36:50: Process Error Message-ID: <9810300.159.1347579506776.JavaMail.coral@shine> Ran recipe#3 w/out problem.. From yjhuo at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: yjhuo at snf.stanford.edu (yjhuo at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-09-14 23:45:16: Message-ID: <28388507.25.1347691517145.JavaMail.coral@shine> From yjhuo at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: yjhuo at snf.stanford.edu (yjhuo at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-09-14 23:52:26: Hexode temperature Message-ID: <31457885.26.1347691947193.JavaMail.coral@shine> During the process running, the Hexode cooling step is continuing even after 30 mins. The Hexode temperature reading is 23 dC. So I aborted the etching process at the end. System is under process 2 standby program. Not sure if it will run properly or not. Sorry for all the troubles. From wtzhao at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: wtzhao at snf.stanford.edu (wtzhao at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-09-20 12:14:34: Error: Cryo pump leakage Message-ID: <10158371.85.1348168475546.JavaMail.coral@shine> Just start to seasoning the chamber, the process stopped at cryo pump down .75, with error msg said: cryo pump leakage. From mdickey at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-09-20 12:14:34: Error: Cryo pump leakage Message-ID: <3632848.86.1348172217454.JavaMail.coral@shine> Checked recipe 3. Made sure Cryo step was no. Ran recipe 3 with no problems From daesung at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-09-20 17:34:04: High vaccum leak Message-ID: <19936848.91.1348187645692.JavaMail.coral@shine> From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-09-20 17:34:04: High vaccum leak Message-ID: <3710771.96.1348192820494.JavaMail.coral@shine> Verified chamber l/r is at 15mt per min. Vented chamber and cleaned sealing surface and belljar o-ring with ipa, pump down chamber for 30mins, ran 10mins and leak up rate dropped to 0.7mt. From mtan at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-09-25 19:57:36: program 3 is not correct Message-ID: <14810542.28.1348628257481.JavaMail.coral@shine> someone altered the recipe. Several paramters have been changed. Need a staff to reset or adjust the recipes. From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-09-25 19:57:36: program 3 is not correct Message-ID: <20589674.32.1348670914459.JavaMail.coral@shine> Re-entered parameters for program 3 From ludwig at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-09-26 17:29:05: Low Bias, arching Message-ID: <31877412.47.1348705745326.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-09-26 17:29:05: Low Bias, arching Message-ID: <6091172.48.1348711765441.JavaMail.coral@shine> User did not properly latch 2 of the trays. Replaced several burnt insulators. From cachang at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-09-27 22:54:29: oxide etch rate Message-ID: <20370000.82.1348811670072.JavaMail.coral@shine> program 3 for 25mins, etch rate = 308A/min 0.7um PR etch rate = 63.4A/min From cachang at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-09-27 22:55:03: vacuum wand not working Message-ID: <27796241.83.1348811704402.JavaMail.coral@shine> seems like leaking somewhere From mdickey at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-09-27 22:55:03: vacuum wand not working Message-ID: <1713110.85.1348839275770.JavaMail.coral@shine> wand replaced From jparker at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-10-23 14:58:36: 1 broken clamp Message-ID: <21170940.49.1351029517769.JavaMail.coral@shine> On the last electrode, lowest wafer, upper left corner, the clamp is broken off. Wafer seems to make contact ok with the other 3 clamps, just use care (and double check that the wafer seats ok each time it's put in). From mdickey at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-10-23 14:58:36: 1 broken clamp Message-ID: <1792943.65.1351090241860.JavaMail.coral@shine> Replaced several worn clips and replaced broken clip From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-04-27 09:03:34: Hexode temperature Message-ID: <16319772.131.1351280967911.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-04-27 14:51:51: Quick check after warm loop turned off Message-ID: <7866488.132.1351280974919.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-07-24 07:26:54: Base plate Message-ID: <8043855.133.1351280984927.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-09-14 23:45:16: Message-ID: <31359193.134.1351280995935.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-09-14 23:52:26: Hexode temperature Message-ID: <24558318.135.1351281055943.JavaMail.coral@shine> Archived From itot at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: itot at snf.stanford.edu (itot at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-10-27 07:18:32: VENT problem Message-ID: <17294192.156.1351347513105.JavaMail.coral@shine> VENT doesn't start and I can't remove my wafers. From itot at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: itot at snf.stanford.edu (itot at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-10-27 07:35:41: cancel my problem Message-ID: <3334495.157.1351348541145.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-10-27 07:18:32: VENT problem Message-ID: <7427928.160.1351395542284.JavaMail.coral@shine> No problem. User forgot to enable tool on Coral. From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-10-27 07:35:41: cancel my problem Message-ID: <9256391.161.1351395589292.JavaMail.coral@shine> User forgot to enable on coral From zzp at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-10-30 00:35:16: system not responsive Message-ID: <30751685.36.1351582517543.JavaMail.coral@shine> it probably needs a reset From junam at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-10-30 00:52:05: SYSTEM ERROR RS 2002 EB EF ED Message-ID: <32560642.37.1351583525932.JavaMail.coral@shine> When I first enabled the tool, it was in "process hold" mode. I ran stanby process again, and vented the chamber. After this, I decided to run longer seasoning of 30 mins for recipe # 3 (oxide etch recipe), and this gave "SYSTEM ERROR RS 2002 EB EF ED" error. The tool is not responding further, so could not recover it. From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-10-30 00:52:05: SYSTEM ERROR RS 2002 EB EF ED Message-ID: <19302931.73.1351630444246.JavaMail.coral@shine> Reset the system. Ran the Standby recipe. From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-10-30 00:35:16: system not responsive Message-ID: <23158154.74.1351630451254.JavaMail.coral@shine> Reset the system. Ran the Standby recipe. From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-11-02 17:55:45: Turbo Pump Message-ID: <10399305.219.1351904146018.JavaMail.coral@shine> Added fomblin oil to turbo pump.. From bchui at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-11-05 17:14:57: Display shows "system error" Message-ID: <24299985.36.1352164498205.JavaMail.coral@shine> and a bunch of hexadecimal digits. Doesn't respond to keypresses. I wasn't trying to use the machine (just walking by and saw the error message) but since it's unusable in its present state I decided to red-light it to reflect its true status. From mdickey at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-11-05 17:14:57: Display shows "system error" Message-ID: <28965003.0.1352214371881.JavaMail.coral@shine> Rebooted the system and topped of the hot loop for the heat eschanger. RAn recipe 2 without any problems From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-11-02 17:55:45: Turbo Pump Message-ID: <11462767.17.1352338248780.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-11-07 17:35:45: Comment Message-ID: <20725317.18.1352338546395.JavaMail.coral@shine> Replace universal address card to fix the intermittent software lockups. From xzhuan1 at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-11-15 16:41:00: some dummy wafers look thin and dirty Message-ID: <27040411.88.1353026461175.JavaMail.coral@shine> please replace some of the summy wafers From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-11-15 16:41:00: some dummy wafers look thin and dirty Message-ID: <6114248.90.1353033086770.JavaMail.coral@shine> Changed all 24 dummy wafers and season the chamber. From cachang at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-11-26 16:12:42: Oxide etch rate not uniform Message-ID: <14424488.51.1353975163543.JavaMail.coral@shine> Program 3 for 25mins same tray but different locations center: 343 A/min bottom: 318 A/min 0.7um resist etch rate: 67A/min From mdickey at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-11-30 07:35:00: pump Message-ID: <15976046.13.1354289701499.JavaMail.coral@shine> down for pump change From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-11-30 14:49:31: Update Message-ID: <19065033.13.1354315771754.JavaMail.coral@shine> Replaced the vacuum. Waiting for the base plate to reach operating temperature. From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-11-30 07:35:00: pump Message-ID: <32957417.18.1354322311638.JavaMail.coral@shine> Elmer changed the backing pump., temp is at set point. Ran process 2 and completed w/out problem. From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-11-30 16:44:18: System faulting for pump stack leak.. Message-ID: <16712816.19.1354322658976.JavaMail.coral@shine> From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-11-30 14:49:31: Update Message-ID: <11463935.24.1354334334882.JavaMail.coral@shine> From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-02 14:40:34: Update Message-ID: <27980180.13.1354488035805.JavaMail.coral@shine> Still trouble shooting the intermittent system lock up and pump stack leak.. From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-11-30 16:44:18: System faulting for pump stack leak.. Message-ID: <4829549.35.1354582560128.JavaMail.coral@shine> We reseated all the eproms on the prom A pcb board and reboot the system w/out problem. Entered all the recipes and ran recipe3 to season the chamber. From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-12-03 16:57:27: To monitor Message-ID: <13808703.36.1354582647998.JavaMail.coral@shine> System is on yellow light , we need to monitor the system lock up problem.. From bchui at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-03 18:37:40: display said "Warming Hexode" Message-ID: <8322517.39.1354588660823.JavaMail.coral@shine> did not use From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-03 18:37:40: display said "Warming Hexode" Message-ID: <16317224.42.1354593496786.JavaMail.coral@shine> No problem found. From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-02 14:40:34: Update Message-ID: <2443519.46.1354633898313.JavaMail.coral@shine> archived From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-12-03 16:57:27: To monitor Message-ID: <13653309.51.1354637372468.JavaMail.coral@shine> The software was stable overnight. From sclaussen at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-12-04 14:25:20: Vent timed out error Message-ID: <17901302.3.1354659921270.JavaMail.coral@shine> Vent is not working properly. Have to press it twice to get it to fully vent the chamber. Also, Process 2 no longer goes to a "Holding" step at the end. Instead, it just ends like the other recipes and waits for the vent. From sclaussen at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-04 15:51:01: Oxide etch rate Message-ID: <17346346.17.1354665062085.JavaMail.coral@shine> Etch rate of densified LTO (which usually etches similarly to thermal oxide) was ~30.0 nm/min. From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-12-04 14:25:20: Vent timed out error Message-ID: <30015984.31.1354671437515.JavaMail.coral@shine> Adjusted ATM switch to trigger when chamber is vented and also corrected process recipe#2. From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-12-05 08:22:35: System software crashed Message-ID: <29819669.1.1354724555624.JavaMail.coral@shine> System software crash with a different error code. From sclaussen at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-05 10:31:06: FL1 error Message-ID: <829102.14.1354732266745.JavaMail.coral@shine> Forgot to mention yesterday that I was also seeing a FL1 error when I would start my program. I got it once, restarted the program, and it ran through. From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Shutdown amtetcher SNF 2012-12-05 08:22:35: System software crashed Message-ID: <2750779.1.1354754351952.JavaMail.coral@shine> Reseated the EPROM on the second (and last) memory board. Ran the standby recipe. No problems observed for > 8 hours.. From sclaussen at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-12-06 13:33:23: FL1 error Message-ID: <12452934.1.1354829603856.JavaMail.coral@shine> Timeout error for FLOW 1 persists.Oscillates between "RDY" and "WAIT." Restarted program once but it still wouldn't start. From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-12-06 13:33:23: FL1 error Message-ID: <22229568.23.1354904770649.JavaMail.coral@shine> Increased in coming O2 pressure From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-05 10:31:06: FL1 error Message-ID: <28391229.24.1354904777717.JavaMail.coral@shine> Archived From sclaussen at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-10 14:25:12: Oxide etch rate fluctuations Message-ID: <18511087.6.1355178312602.JavaMail.coral@shine> Measured an etch rate of 26 nm/min for dens. LTO in my first etch, then later in a second etch it rose to about 29 nm/min. From sclaussen at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-10 14:25:34: FL1 error Message-ID: <22588100.7.1355178334822.JavaMail.coral@shine> I got this error again for Process 3. Restarting the program seemed to work fine. From karthikv at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-11 11:37:47: FL1 Error Message-ID: <24177700.0.1355254668197.JavaMail.coral@shine> Got FL1 error in Process #3. Restarted program and it ran fine. From xuanwu at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-11 17:54:25: FL1 error Message-ID: <6204829.2.1355277265340.JavaMail.coral@shine> same as previous user; restarted process and it was fine From cachang at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-12-12 13:21:12: Flow 1 out limit Message-ID: <12280405.2.1355347273105.JavaMail.coral@shine> When I season the chamber (process 3), I saw this error message From cachang at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-12 14:28:47: oxide etch rate Message-ID: <10796546.11.1355351328152.JavaMail.coral@shine> Program 3 for 10mins, thermal oxide etch rate = 354 A/min From shott at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-12-12 15:27:11: Low silicon etch rate on recipe 4 ... Message-ID: <11700608.4.1355354832337.JavaMail.coral@shine> We were trying to etch some ASML global alignment marks on a set of wafers. We used recipe 4 for a time of 6 minutes and expected and etch depth of about 0.125 to 0.150 um. A Zygo measurement after resist strip of a single wafer showed a step heigh of only about 0.038 um. The wafers had a 2 mm edge bead of exposed silicon and 4 of the global aligment marks spaced about 6 mm in from the edge of the wafer. As a result, the edge bead dominated the exposed area of silicon. Each run that 3 pallets (12 wafers) of these wafers with the remaining 3 pallets containing dummies. If you are etching global alignment marks for the ASML, please proceed with caution. Resist coating was 1 um of 3612 resist. John From latta at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-10 14:25:34: FL1 error Message-ID: <24936781.42.1355535718838.JavaMail.coral@shine> ok now From latta at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-11 11:37:47: FL1 Error Message-ID: <22641604.43.1355535728907.JavaMail.coral@shine> archived From latta at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-11 17:54:25: FL1 error Message-ID: <13932537.44.1355535739964.JavaMail.coral@shine> archived From latta at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-12-12 13:21:12: Flow 1 out limit Message-ID: <17379477.45.1355535756086.JavaMail.coral@shine> ok now From popomoo at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-12-15 17:33:00: flow 1 out limit error Message-ID: <16373878.55.1355621581120.JavaMail.coral@shine> I tried to use the recipe #3, but I could not run it because of the error "Flow 1 out limit" From cbaxter at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Problem amtetcher SNF 2012-12-15 17:33:00: flow 1 out limit error Message-ID: <13809944.4.1355670480979.JavaMail.coral@shine> Ran recipe 3 and 2 w/out problem. MFC #1 will be sent out for cal during the lab shutdown. From eenriquez at snf.stanford.edu Fri Jan 11 13:03:36 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:03:36 -0000 Subject: Comment amtetcher SNF 2012-12-17 15:24:40: Update low silicon etch rate Message-ID: <8563537.47.1355786680820.JavaMail.coral@shine> All mfc flow checks are too low. Still troubleshooting. Now performing capacitance manometer and throttle valve calibrations.