Problem amtetcher: Please fix this ASAP. I need it badly.

sanli at snf.stanford.edu sanli at snf.stanford.edu
Fri Jan 11 13:03:36 PST 2013


One of the wafer clips at the bottom of the first tray is broken. It still holds the wafer, but I did not do a run. I tried to do a seasoning. Everything seemed OK, but the plasma was flashing, and there was a clicking sound heard occasionaly. I decided not to do an actual run.




More information about the amtetcher-pcs mailing list