Shutdown amtetcher: Tray#1 wafer clip is broken off.
booth at snf.stanford.edu
booth at snf.stanford.edu
Fri Jan 11 13:03:36 PST 2013
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Problem amtetcher: Turbo went off. Display lists as not ready, instead of holding at process #2. I silenced the alarm.
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Shutdown Clear amtetcher: replaced wafer clip on tray# 1 D.
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Previous message:
Problem amtetcher: Turbo went off. Display lists as not ready, instead of holding at process #2. I silenced the alarm.
Next message:
Shutdown Clear amtetcher: replaced wafer clip on tray# 1 D.
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