Problem amtetcher: hex clicks when rotating, sometimes does not seat properly & alarms.
beckwith at snf.stanford.edu
beckwith at snf.stanford.edu
Fri Jan 11 13:03:36 PST 2013
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Problem amtetcher: vacuum leak, use tweezers to load & unload your wafers until it is repaired.
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Problem Clear amtetcher: restarted turbo pump.
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Previous message:
Problem amtetcher: vacuum leak, use tweezers to load & unload your wafers until it is repaired.
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Problem Clear amtetcher: restarted turbo pump.
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