Problem amtetcher SNF 2012-08-17 15:12:03: strange error message

xuanwu at snf.stanford.edu xuanwu at snf.stanford.edu
Fri Jan 11 13:03:36 PST 2013


"FL SNS ALWAYS ON
FIX OR PUSH RUN"
I have 9 wafers in there in the middle of process 4 (time=5.4 min), but I'm not sure where in the etch the power was interrupted.  Please e-mail me if you know what the error message means and how to deal with it.  Please put wafers in wafer box on top of the machine if you manage to get them out.
Thanks.



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