Comment amtetcher SNF 2012-09-14 23:52:26: Hexode temperature

yjhuo at snf.stanford.edu yjhuo at snf.stanford.edu
Fri Jan 11 13:03:36 PST 2013


During the process running, the Hexode cooling step is continuing even after 30 mins. The Hexode temperature reading is 23 dC. So I aborted the etching process at the end.
System is under process 2 standby program. Not sure if it will run properly or not.  
Sorry for all the troubles.



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