Shutdown amtetcher SNF 2012-09-20 12:14:34: Error: Cryo pump leakage

wtzhao at snf.stanford.edu wtzhao at snf.stanford.edu
Fri Jan 11 13:03:36 PST 2013


Just start to seasoning the chamber,  the process stopped at cryo pump down .75, with error msg said: cryo pump leakage.



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