Comment amtetcher SNF 2012-09-27 22:54:29: oxide etch rate

cachang at snf.stanford.edu cachang at snf.stanford.edu
Fri Jan 11 13:03:36 PST 2013


program 3 for 25mins, etch rate = 308A/min
0.7um PR etch rate = 63.4A/min



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