Shutdown amtetcher SNF 2012-10-30 00:52:05: SYSTEM ERROR RS 2002 EB EF ED

junam at snf.stanford.edu junam at snf.stanford.edu
Fri Jan 11 13:03:36 PST 2013


When I first enabled the tool, it was in "process hold" mode. I ran stanby process again, and vented the chamber. After this, I decided to run longer seasoning of 30 mins for recipe # 3 (oxide etch recipe), and this gave "SYSTEM ERROR RS 2002 EB EF ED" error. The tool is not responding further, so could not recover it.



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