Comment amtetcher SNF 2012-11-26 16:12:42: Oxide etch rate not uniform

cachang at snf.stanford.edu cachang at snf.stanford.edu
Fri Jan 11 13:03:36 PST 2013


Program 3 for 25mins
same tray but different locations
center: 343 A/min
bottom: 318 A/min
0.7um resist etch rate: 67A/min



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