Shutdown amtetcher SNF 2012-11-30 16:44:18: System faulting for pump stack leak..

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Jan 11 13:03:36 PST 2013


We reseated all the eproms on the prom A pcb board and reboot the
system w/out problem. Entered all the recipes  and ran recipe3 to
season the chamber. 



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