Comment amtetcher SNF 2012-12-10 14:25:12: Oxide etch rate fluctuations

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Fri Jan 11 13:03:36 PST 2013


Measured an etch rate of 26 nm/min for dens. LTO in my first etch, then later in a second etch it rose to about 29 nm/min.



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