Comment amtetcher SNF 2012-12-17 15:24:40: Update low silicon etch rate

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jan 11 13:03:36 PST 2013


All mfc flow checks are too low.  Still troubleshooting.  Now performing capacitance manometer and throttle valve calibrations.



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