January 2013 Archives by author

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Starting: Fri Jan 11 13:03:36 PST 2013
Ending: Fri Jan 11 13:03:36 PST 2013
Messages: 145

Shutdown amtetcher: Cryo Pump anolley at snf.stanford.edu
Shutdown amtetcher SNF 2012-11-05 17:14:57: Display shows "system error" bchui at snf.stanford.edu
Comment amtetcher SNF 2012-12-03 18:37:40: display said "Warming Hexode" bchui at snf.stanford.edu
Shutdown amtetcher: beckwith at snf.stanford.edu
Problem amtetcher: vacuum leak, use tweezers to load & unload your wafers until it is repaired. beckwith at snf.stanford.edu
Problem amtetcher: hex clicks when rotating, sometimes does not seat properly & alarms. beckwith at snf.stanford.edu
Problem amtetcher: hex makes clicking noise while rotating, sometimes does not seat properly causing the alram to sound. beckwith at snf.stanford.edu
Problem amtetcher: mfc to gas 3 needs to be zeroed, drifts & get a RO of 1 sometimes. beckwith at snf.stanford.edu
Shutdown amtetcher: tray #6 arced at latch booth at snf.stanford.edu
Shutdown amtetcher: Tray#1 wafer clip is broken off. booth at snf.stanford.edu
Shutdown Clear amtetcher: replaced wafer clip on tray# 1 D. booth at snf.stanford.edu
Problem Clear amtetcher: cleared. booth at snf.stanford.edu
Problem Clear amtetcher: cleared. booth at snf.stanford.edu
Problem Clear amtetcher: restarted turbo pump. booth at snf.stanford.edu
Problem Clear amtetcher: replaced quartz wand tip, fixed vac hose. booth at snf.stanford.edu
Problem Clear amtetcher: booth at snf.stanford.edu
Problem Clear amtetcher: booth at snf.stanford.edu
Problem Clear amtetcher: low priority. booth at snf.stanford.edu
Problem Clear amtetcher: known problem - press the jog button again. booth at snf.stanford.edu
Shutdown amtetcher: temporary shutdown - back by mid-morning. Len booth at snf.stanford.edu
Problem Clear amtetcher: checked that cold loop set= 19C. booth at snf.stanford.edu
Shutdown amtetcher: Leak in foreline bellows. booth at snf.stanford.edu
Shutdown Clear amtetcher: replaced foreline bellows & reouted. booth at snf.stanford.edu
Shutdown Clear amtetcher: booth at snf.stanford.edu
Problem Clear amtetcher: cleaned cryo purge valve & it leak checked OK. booth at snf.stanford.edu
Shutdown Clear amtetcher: brought back the RF supply relay. booth at snf.stanford.edu
Comment amtetcher SNF 2012-12-12 14:28:47: oxide etch rate cachang at snf.stanford.edu
Problem amtetcher SNF 2012-12-12 13:21:12: Flow 1 out limit cachang at snf.stanford.edu
Comment amtetcher SNF 2012-11-26 16:12:42: Oxide etch rate not uniform cachang at snf.stanford.edu
Comment amtetcher SNF 2012-09-27 22:54:29: oxide etch rate cachang at snf.stanford.edu
Problem amtetcher SNF 2012-09-27 22:55:03: vacuum wand not working cachang at snf.stanford.edu
Comment amtetcher SNF 2012-11-02 17:55:45: Turbo Pump cbaxter at snf.stanford.edu
Comment amtetcher SNF 2012-11-30 14:49:31: Update cbaxter at snf.stanford.edu
Problem amtetcher SNF 2012-12-03 16:57:27: To monitor cbaxter at snf.stanford.edu
Problem amtetcher SNF 2012-12-15 17:33:00: flow 1 out limit error cbaxter at snf.stanford.edu
Comment amtetcher SNF 2012-12-03 18:37:40: display said "Warming Hexode" cbaxter at snf.stanford.edu
Shutdown amtetcher SNF 2012-11-30 16:44:18: System faulting for pump stack leak.. cbaxter at snf.stanford.edu
Shutdown amtetcher SNF 2012-09-02 18:14:01: Update cbaxter at snf.stanford.edu
Comment amtetcher SNF 2012-12-02 14:40:34: Update cbaxter at snf.stanford.edu
Problem amtetcher SNF 2012-12-04 14:25:20: Vent timed out error cbaxter at snf.stanford.edu
Shutdown amtetcher SNF 2012-11-30 07:35:00: pump cbaxter at snf.stanford.edu
Shutdown amtetcher SNF 2012-09-20 17:34:04: High vaccum leak cbaxter at snf.stanford.edu
Shutdown amtetcher SNF 2012-11-30 16:44:18: System faulting for pump stack leak.. cbaxter at snf.stanford.edu
Problem amtetcher SNF 2012-08-26 00:14:00: hexode 21 deg c+ ? cbaxter at snf.stanford.edu
Problem amtetcher SNF 2012-11-15 16:41:00: some dummy wafers look thin and dirty cbaxter at snf.stanford.edu
Shutdown amtetcher SNF 2012-08-17 16:24:18: no cooling water cbaxter at snf.stanford.edu
Problem amtetcher SNF 2012-08-17 15:12:03: strange error message cbaxter at snf.stanford.edu
Problem amtetcher SNF 2012-09-13 09:36:50: Process Error cbaxter at snf.stanford.edu
Shutdown Clear amtetcher: cleaned arc mark om tray. cbaxter at snf.stanford.edu
Shutdown amtetcher: need to replace clip's on tray cbaxter at snf.stanford.edu
Shutdown Clear amtetcher: changed tray#2 bottom clip cbaxter at snf.stanford.edu
Problem Clear amtetcher: cbaxter at snf.stanford.edu
Problem Clear amtetcher: cbaxter at snf.stanford.edu
Shutdown amtetcher: cbaxter at snf.stanford.edu
Shutdown Clear amtetcher: cbaxter at snf.stanford.edu
Problem Clear amtetcher: don't it will cause any problem. i jog the hex cw and ccw , it make that very lite chattering when hex is returning at home position. it look like gear drive need to lube on next wet clean pm. cbaxter at snf.stanford.edu
Problem amtetcher SNF 2012-09-13 09:36:50: Process Error chienyuc at snf.stanford.edu
Problem amtetcher: crozier at snf.stanford.edu
Problem amtetcher: tray2 bottom wafer - clip broken crozier at snf.stanford.edu
Shutdown amtetcher SNF 2012-09-20 17:34:04: High vaccum leak daesung at snf.stanford.edu
Comment amtetcher SNF 2012-11-02 17:55:45: Turbo Pump eenriquez at snf.stanford.edu
Shutdown amtetcher SNF 2012-09-02 18:14:01: Update eenriquez at snf.stanford.edu
Problem amtetcher SNF 2012-12-03 16:57:27: To monitor eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-04-27 09:03:34: Hexode temperature eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-08-01 08:41:45: oil eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-11-30 14:49:31: Update eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-09-04 14:25:06: Update eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-08-26 00:36:41: please ignore my previous report for the problem eenriquez at snf.stanford.edu
Shutdown amtetcher SNF 2012-10-30 00:52:05: SYSTEM ERROR RS 2002 EB EF ED eenriquez at snf.stanford.edu
Problem amtetcher SNF 2012-09-25 19:57:36: program 3 is not correct eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-11-07 17:35:45: Comment eenriquez at snf.stanford.edu
Problem amtetcher SNF 2012-12-06 13:33:23: FL1 error eenriquez at snf.stanford.edu
Problem amtetcher SNF 2012-10-30 00:35:16: system not responsive eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-12-02 14:40:34: Update eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-09-14 23:52:26: Hexode temperature eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-09-05 12:18:04: Update eenriquez at snf.stanford.edu
Shutdown amtetcher SNF 2012-12-05 08:22:35: System software crashed eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-09-04 14:25:06: Update eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-12-05 10:31:06: FL1 error eenriquez at snf.stanford.edu
Shutdown amtetcher SNF 2012-08-17 16:24:18: no cooling water eenriquez at snf.stanford.edu
Shutdown amtetcher SNF 2012-12-05 08:22:35: System software crashed eenriquez at snf.stanford.edu
Shutdown amtetcher SNF 2012-09-13 09:56:09: shutdown eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-09-14 23:45:16: eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-09-11 12:09:40: Update eenriquez at snf.stanford.edu
Problem amtetcher SNF 2012-09-02 10:37:15: broken eenriquez at snf.stanford.edu
Shutdown amtetcher SNF 2012-09-26 17:29:05: Low Bias, arching eenriquez at snf.stanford.edu
Problem amtetcher SNF 2012-10-27 07:18:32: VENT problem eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-04-27 14:51:51: Quick check after warm loop turned off eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-07-24 07:26:54: Base plate eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-12-17 15:24:40: Update low silicon etch rate eenriquez at snf.stanford.edu
Problem amtetcher SNF 2012-10-27 07:35:41: cancel my problem eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-09-11 12:09:40: Update eenriquez at snf.stanford.edu
Comment amtetcher SNF 2012-09-05 12:18:04: Update eenriquez at snf.stanford.edu
Problem amtetcher: Turbo went off. Display lists as not ready, instead of holding at process #2. I silenced the alarm. frankliu at snf.stanford.edu
Shutdown amtetcher: Water Leak in basement gaul at snf.stanford.edu
Problem amtetcher: hexode motor sticking hopcroft at snf.stanford.edu
Shutdown amtetcher: hex won't turn hopcroft at snf.stanford.edu
Problem amtetcher SNF 2012-10-27 07:18:32: VENT problem itot at snf.stanford.edu
Problem amtetcher SNF 2012-10-27 07:35:41: cancel my problem itot at snf.stanford.edu
Comment amtetcher SNF 2012-08-26 00:36:41: please ignore my previous report for the problem jaehlee at snf.stanford.edu
Problem amtetcher SNF 2012-08-26 00:14:00: hexode 21 deg c+ ? jaehlee at snf.stanford.edu
Comment amtetcher SNF 2012-10-23 14:58:36: 1 broken clamp jparker at snf.stanford.edu
Shutdown amtetcher SNF 2012-10-30 00:52:05: SYSTEM ERROR RS 2002 EB EF ED junam at snf.stanford.edu
Comment amtetcher SNF 2012-12-11 11:37:47: FL1 Error karthikv at snf.stanford.edu
Comment amtetcher SNF 2012-12-11 17:54:25: FL1 error latta at snf.stanford.edu
Problem amtetcher SNF 2012-12-12 13:21:12: Flow 1 out limit latta at snf.stanford.edu
Comment amtetcher SNF 2012-12-11 11:37:47: FL1 Error latta at snf.stanford.edu
Comment amtetcher SNF 2012-12-10 14:25:34: FL1 error latta at snf.stanford.edu
Shutdown amtetcher: latta at snf.stanford.edu
Shutdown Clear amtetcher: latta at snf.stanford.edu
Shutdown Clear amtetcher: latta at snf.stanford.edu
Shutdown Clear amtetcher: limited use- tray one only. latta at snf.stanford.edu
Shutdown amtetcher SNF 2012-09-26 17:29:05: Low Bias, arching ludwig at snf.stanford.edu
Problem amtetcher SNF 2012-09-02 10:37:15: broken maxms at snf.stanford.edu
Shutdown Clear amtetcher: MikeR put in new H2O reg in cooling sys. Jim mcvittie at snf.stanford.edu
Shutdown Clear amtetcher: Ok to run w/o cryo pump. Needed longer pumpdw. 12 min mcvittie at snf.stanford.edu
Problem amtetcher: Cryo pump still off. Needed longer pumpdw mcvittie at snf.stanford.edu
Shutdown amtetcher SNF 2012-11-30 07:35:00: pump mdickey at snf.stanford.edu
Problem amtetcher SNF 2012-09-27 22:55:03: vacuum wand not working mdickey at snf.stanford.edu
Comment amtetcher SNF 2012-10-23 14:58:36: 1 broken clamp mdickey at snf.stanford.edu
Shutdown amtetcher SNF 2012-09-13 09:56:09: shutdown mdickey at snf.stanford.edu
Shutdown amtetcher SNF 2012-11-05 17:14:57: Display shows "system error" mdickey at snf.stanford.edu
Shutdown amtetcher SNF 2012-09-20 12:14:34: Error: Cryo pump leakage mdickey at snf.stanford.edu
Problem amtetcher SNF 2012-09-25 19:57:36: program 3 is not correct mtan at snf.stanford.edu
Shutdown amtetcher: maintenence pcastle at snf.stanford.edu
Problem amtetcher: wafer clip broke bottom spot 1st panal phimmer at snf.stanford.edu
Problem amtetcher SNF 2012-12-15 17:33:00: flow 1 out limit error popomoo at snf.stanford.edu
Problem amtetcher: cold loop at 34c price at snf.stanford.edu
Shutdown amtetcher: Hex will not rotate price at snf.stanford.edu
Problem amtetcher: Awful sound while tray is rotating sanli at snf.stanford.edu
Problem amtetcher: Please fix this ASAP. I need it badly. sanli at snf.stanford.edu
Problem amtetcher SNF 2012-12-06 13:33:23: FL1 error sclaussen at snf.stanford.edu
Comment amtetcher SNF 2012-12-04 15:51:01: Oxide etch rate sclaussen at snf.stanford.edu
Problem amtetcher SNF 2012-12-04 14:25:20: Vent timed out error sclaussen at snf.stanford.edu
Comment amtetcher SNF 2012-12-10 14:25:12: Oxide etch rate fluctuations sclaussen at snf.stanford.edu
Comment amtetcher SNF 2012-12-10 14:25:34: FL1 error sclaussen at snf.stanford.edu
Comment amtetcher SNF 2012-12-05 10:31:06: FL1 error sclaussen at snf.stanford.edu
Problem amtetcher SNF 2012-12-12 15:27:11: Low silicon etch rate on recipe 4 ... shott at snf.stanford.edu
Shutdown amtetcher SNF 2012-09-20 12:14:34: Error: Cryo pump leakage wtzhao at snf.stanford.edu
Problem amtetcher SNF 2012-08-17 15:12:03: strange error message xuanwu at snf.stanford.edu
Comment amtetcher SNF 2012-12-11 17:54:25: FL1 error xuanwu at snf.stanford.edu
Problem amtetcher SNF 2012-11-15 16:41:00: some dummy wafers look thin and dirty xzhuan1 at snf.stanford.edu
Comment amtetcher SNF 2012-09-14 23:45:16: yjhuo at snf.stanford.edu
Comment amtetcher SNF 2012-09-14 23:52:26: Hexode temperature yjhuo at snf.stanford.edu
Problem amtetcher SNF 2012-10-30 00:35:16: system not responsive zzp at snf.stanford.edu

Last message date: Fri Jan 11 13:03:36 PST 2013
Archived on: Fri Jan 11 13:04:10 PST 2013

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