Thick resist

Uma Krishnamoorthy ukris at loki.stanford.edu
Fri Aug 11 10:51:58 PDT 2000


Does anyone have much experience using thick resist (SPR220-7) as a mask
for oxide etching on the amtetcher? If so, any suggestions on
preprocessing  my wafers before the etch step? 

Also, I need to etch a very thin layer of oxide (~500A) on my wafer. With
Sharleen leaving, I cannot get trained on the equipment either.  Is anyone
running a similar program that I could piggyback on anytime soon? 

Thanks

Uma

**************************************************************
Uma Krishnamoorthy
E.L.Ginzton Labs, 41-C
450 Via Palou
Stanford, CA 94305
(650)723-6104
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