From booth at snf.stanford.edu  Wed Oct  4 14:12:34 2000
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 04 Oct 2000 14:12:34 -0700
Subject: AMTetcher - cryo is working again.
Message-ID: <39DB9D42.2D12F2D7@snf.stanford.edu>

Users -			Wednesday  10/4/00  2:00 PM
	The cryopump on the amtetcher is working
again, and is ready for use.  I've changed program
#3 so the cryo step will be used before the
process starts.  Check the other programs and make
sure that they will use the cryopump step also.
	After the cryo was fixed, faults started
coming from the turbopump system.  The foreline
bellows had a leak, so that has been replaced
and the foreline rerouted.
	Also, the pyrex window for the operators
viewport has been replaced (you can actually
see the wafers on the hex now!).
	As usual, please send me an e-mail if
you experience any more problems with the machine.
			Len


From booth at snf.stanford.edu  Tue Oct 24 11:51:30 2000
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 24 Oct 2000 11:51:30 -0700
Subject: AMTetcher is up
Message-ID: <39F5DA32.FCBE50B3@snf.stanford.edu>

Users -
	The cryopump is working again on the amt.
Cryo temperature this morning is about 16deg K.
I've changed recipe#3 to use the cryopump step,
but you need to check the other recipes and make sure
that they are using the cryopump step also.
			Len


From booth at snf.stanford.edu  Fri Oct 27 09:22:50 2000
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 27 Oct 2000 09:22:50 -0700
Subject: AMTetcher is down
Message-ID: <39F9ABDA.6E767C30@snf.stanford.edu>

Users -
	The water pump that circulates cooling water
through the amt hexode has failed.  I've ordered
a replacement & it's coming from Portland.  If it
arrives Monday morning, the machine should be
up & available by Monday afternoon.
			Len