From mcvittie at cis.Stanford.EDU Fri Apr 13 14:25:46 2001 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Fri, 13 Apr 2001 14:25:46 -0700 (PDT) Subject: Problems with Thick Resist in Etchers Message-ID: Lam, P5000, and Amtetcher Users, We just had major problems in both the Lam and P5000 due a user etching wafers with thick resist on them. Both machines were brought down and needed complete manual chamber cleans. PLEASE FOLLOW THE RULES and stay with thin resist (< 2 um) for wafers going into the Lam, P5000, and Amtetcher. Thanks, Jim -------------------------------------------------------------- James P. McVittie Senior Research Scientist Allen Center for Integrated Systems jmcvittie at stanford.edu Stanford University Tel: (650) 725-3640 Rm. 336, 330 Serra Mall Fax: (650) 723-4659 Stanford, CA 94305-4075 From sanli at piezo.Stanford.EDU Mon Apr 16 13:09:26 2001 From: sanli at piezo.Stanford.EDU (Sanli Ergun) Date: Mon, 16 Apr 2001 13:09:26 -0700 (PDT) Subject: reservation cancelled Message-ID: I could get into amtetcher early and finish early, so evalign is now available till 4pm. ________________________________________________________ Arif Sanli Ergun Engineering Research Associate E. L. Ginzton Laboratory, Room : 130, Stanford University, Stanford, CA, 94305-4085 Phone: (650) 723-8447 Fax : (650) 725-7509 www : http://piezo.stanford.edu/group/IRP/sanliIRP.html