Problems with Thick Resist in Etchers

Jim McVittie mcvittie at cis.Stanford.EDU
Fri Apr 13 14:25:46 PDT 2001

Lam, P5000, and Amtetcher Users,

We just had major problems in both the Lam and P5000 due a user
etching wafers with thick resist on them. Both machines were brought down
and needed complete manual chamber cleans. PLEASE FOLLOW THE RULES and
stay with thin resist (< 2 um) for wafers going into the Lam, P5000, and

	Thanks,   Jim 	
James P. McVittie	                Senior Research Scientist
Allen Center for Integrated Systems     jmcvittie at
Stanford University             	Tel: (650) 725-3640	
Rm. 336, 330 Serra Mall			Fax: (650) 723-4659
Stanford, CA 94305-4075	

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