From rcrane at snf.stanford.edu Mon Aug 6 17:29:41 2001 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 06 Aug 2001 17:29:41 -0700 Subject: Toxic gas tests complete Message-ID: <3B6F3675.B7C5D461@snf.stanford.edu> The toxic gas alarm system tests are now complete. All tools using toxic gases are back up with the following exceptions: tylanpoly tylanbpsg tylanSiGe tystar 1 EPI Silane MFC calibrations are still being completed. Tools should be up tomorrow. Thanks, Dick From cbaxter at snf.stanford.edu Fri Aug 24 17:25:51 2001 From: cbaxter at snf.stanford.edu (Cesar Baxter) Date: Fri, 24 Aug 2001 17:25:51 -0700 Subject: Down Message-ID: <3B86F08F.28A2BE6E@snf.stanford.edu> Tool will be down, need a new ac male connector plug. currently looking for a replacement... Cesar From eap at gloworm.Stanford.EDU Mon Aug 27 21:54:08 2001 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Mon, 27 Aug 2001 21:54:08 -0700 (PDT) Subject: AMT- back alive Message-ID: <200108280454.VAA10680@gloworm.Stanford.EDU> Hi All, the AMT seems to be back alive. I re-entered all of the programs, but you should REcheck them before using them. I found at least one mistake in the book. If you happen to be the first user, I left some special instructions for you on the machine. If you have problems or questions, ask one of the experienced users or staff before proceeding. For those nocturnal lab users (or someone who might need the machine desparately), it should be ready to go by midnight (monday night). The first user gets the priviledge of running a seasoning run. -Eric From beckwith at snf.stanford.edu Tue Aug 28 09:52:14 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Tue, 28 Aug 2001 09:52:14 -0700 Subject: AMT- back alive In-Reply-To: <200108280454.VAA10680@gloworm.Stanford.EDU> References: <200108280454.VAA10680@gloworm.Stanford.EDU> Message-ID: At 9:54 PM -0700 8/27/01, Eric Perozziello wrote: >Hi All, > > the AMT seems to be back alive. I re-entered all of the >programs, but you should REcheck them before using them. I found >at least one mistake in the book. > If you happen to be the first user, I left some special >instructions for you on the machine. If you have problems or questions, >ask one of the experienced users or staff before proceeding. > For those nocturnal lab users (or someone who might need the >machine desparately), it should be ready to go by midnight (monday night). >The first user gets the priviledge of running a seasoning run. > >-Eric Thanks Eric! AND (!) thanks to Cesar, Dick Crane, and Jim Haydon for working on this. I hope the amt keeps running for a while, now. Sometimes it takes a group effort to keep equipment up and running. Thanks again. From beckwith at snf.stanford.edu Tue Aug 28 16:53:14 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Tue, 28 Aug 2001 16:53:14 -0700 (PDT) Subject: amtetcher cryo problems Message-ID: Folks: For some reason the cryo and the machine are not speaking to one another. Therefore: 1. All programs must be run with no cryo and the base pressure must be set at .4 (not .2). 2. The chamber pumpdown may take longer than normal especially when the bell jar has been left open for long periods of time. Hint: close the bell jar when you are not actually loading and unloading your wafers. 3. The machine may alarm during the pumpdown. Just push RUN again. You may monitor the pumpdown by pressing the pressure button (once it reaches the turbo pmpdn stage) until you see the reading for the ion guage (IG). If you have any questions about any of this please get in touch with Dick Crane or Cesar Baxter. Sharleen From rcrane at snf.stanford.edu Tue Aug 28 17:51:43 2001 From: rcrane at snf.stanford.edu (Dick Crane) Date: Tue, 28 Aug 2001 17:51:43 -0700 Subject: Shut down for low bias and rf power. Message-ID: <3B8C3C9F.E522DA46@snf.stanford.edu> Shut down for low bias and rf power. From latta at snf.stanford.edu Fri Aug 31 15:27:27 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Fri, 31 Aug 2001 15:27:27 -0700 Subject: Up and running! Message-ID: <3B900F4F.A21AD9A2@snf.stanford.edu>