amtetcher cryo problems

Sharleen Beckwith beckwith at snf.stanford.edu
Tue Aug 28 16:53:14 PDT 2001


Folks:

For some reason the cryo and the machine are not speaking to one 
another. Therefore:

1.  All programs must be run with no cryo and the base pressure 
must be set at .4 (not .2).

2. The chamber pumpdown may take longer than normal especially when 
the bell jar has been left open for long periods of time. Hint: 
close the bell jar when you are not actually loading and unloading
your wafers.

3. The machine may alarm during the pumpdown. Just push RUN again. 
You may monitor the pumpdown by pressing the pressure button (once it
reaches the turbo pmpdn stage) until you see the reading for the ion
guage (IG).

If you have any questions about any of this please get in touch with
Dick Crane or Cesar Baxter. 

Sharleen




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