From hphan at snf.stanford.edu  Fri Jul 20 07:57:30 2001
From: hphan at snf.stanford.edu (Henry Phan)
Date: Fri, 20 Jul 2001 07:57:30 -0700
Subject: AMTetcher
Message-ID: <3B5846DA.F2A1DDED@snf.stanford.edu>

AMT Etcher has been cleaned. I replaced all the dummy wefer, and ran
thirty minutes seasoning. Chamber is working ok now.



From rcrane at snf.stanford.edu  Mon Jul 30 16:19:01 2001
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Mon, 30 Jul 2001 16:19:01 -0700
Subject: Toxic gas shutdown Aug. 6
Message-ID: <3B65EB65.1A0E4C61@snf.stanford.edu>

On Monday, August 6, 2001, from 0800 to 1600, the toxic gas distribution
system will shut down to allow reprogramming and testing of the gas
detection system as part of the fire alarm upgrade.
 
The following tools will be affected:
 
STSdep, EPI, PECVD, Plasmaquest, LAMpoly, P5000etch, AMTetcher,
TylanSiGe, Tylanpoly, TylanBPSG, Tylannitride, and Tystar.

The system will be tested during the day with occasional audio and
strobe test alarms. Please disregard toxic (blue light) alarms from 0800
to 1600 on Monday, August 6.

Thanks,

Dick