From pascal_zwahlen at yahoo.com  Mon May 14 12:03:20 2001
From: pascal_zwahlen at yahoo.com (Pascal Zwahlen)
Date: Mon, 14 May 2001 12:03:20 -0700 (PDT)
Subject: Removed reservation today from 3 to 4:30pm
Message-ID: <20010514190320.12735.qmail@web5203.mail.yahoo.com>

I won't be able to use my reservation this afternoon
from 3pm to 4:30pm. 

Pascal Zwahlen
Zyomyx, Inc.

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From bgreene at stanford.edu  Thu May 17 10:29:09 2001
From: bgreene at stanford.edu (Brian Joseph Greene)
Date: Thu, 17 May 2001 10:29:09 -0700 (PDT)
Subject: released amtetcher reservation 10:30-2:00
Message-ID: <Pine.GSO.4.05.10105171028040.2267-100000@cvd.Stanford.EDU>

Sorry for the late notice.

Brian Greene



From beckwith at snf.stanford.edu  Thu May 17 15:37:36 2001
From: beckwith at snf.stanford.edu (Sharleen Beckwith)
Date: Thu, 17 May 2001 15:37:36 -0700 (PDT)
Subject: creeping thermal ox. etch rate?
Message-ID: <Pine.LNX.4.04.10105171527310.22691-100000@snf.stanford.edu>


I just finished etching some thermal oxide using program 3.
On 3/29/01 the etch rate was 360A/min. for a 20 min. etch.
On 4/19/01 the etch rate was 385A/min. for an 18 min. etch.
Today the etch rate was 392A/min. for an 18 min. etch.

Does anyone have any other data on this. These are the only etch rates I
found in the log book.

Thanks.

Sharleen