From latta at snf.stanford.edu  Mon Nov  5 12:15:08 2001
From: latta at snf.stanford.edu (Nancy Latta)
Date: Mon, 05 Nov 2001 12:15:08 -0800
Subject: Arcing, a reminder
Message-ID: <3BE6F34C.5C58B6BC@snf.stanford.edu>

Folks,

We are seeing an increase in arcing incidents in recent weeks.  Please
make sure that you take the time to inspect the trays and latches every
time you use the etcher.  Even if you are using all of the six trays it
is very important that you check all of them for burn marks.

It takes significant effort to repair acing burns after they have
occured.  In many cases simply looking at the whole hexode will catch
potential problems before they occur.  This will decrease downtime for
the etcher as well as lighten the load of the maintenance crew.

Thanks for your attention to this,

				Nancy


From hphan at snf.stanford.edu  Mon Nov 19 17:22:17 2001
From: hphan at snf.stanford.edu (Henry Phan)
Date: Mon, 19 Nov 2001 17:22:17 -0800
Subject: [Fwd: Cryo Pump]
Message-ID: <3BF9B049.4F22177A@snf.stanford.edu>


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Subject: Cryo Pump
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From hphan at snf.stanford.edu  Tue Nov 27 10:08:50 2001
From: hphan at snf.stanford.edu (Henry Phan)
Date: Tue, 27 Nov 2001 10:08:50 -0800
Subject: Arcing Problem
Message-ID: <3C03D6B2.7EBB65FB@snf.stanford.edu>

Dear User:
The AMT has an arcing frequently. In order to save our time, please
check six hexodes before and after the process. If you found the arcing
on the hexode, please contact the maintenance right away. Thank you for
your cooperation.

Henry