From mbadi at relgyro.stanford.edu Tue Sep 4 17:49:17 2001 From: mbadi at relgyro.stanford.edu (Mohammed H. Badi) Date: Tue, 4 Sep 2001 17:49:17 -0700 (PDT) Subject: Etching Rates with AMT Message-ID: hey all, AMT was shut down today b/c the etch rates were off with a few programs. I spoke to Len about it and said it would help him to find the problem if we could let him know what our experiences have been with AMT over the past few days. He asked that we send our results to the list. Specifically: what program we ran, what film(s) we etched, and the etch rates. My data: I ran Fri-Mon and etched low-stress (LONH378) nitride using program 24. I had an etch rate of 880A/min in the beginning which slowed down to ~700 A/min by Monday. From my experiences in the past, this data is normal for the AMT. Thanks. moe. -------- Mohammed H. Badi Bounce. 650-906-0663 From bgreene at stanford.edu Wed Sep 5 11:37:13 2001 From: bgreene at stanford.edu (Brian Joseph Greene) Date: Wed, 5 Sep 2001 11:37:13 -0700 (PDT) Subject: Removed AMT reservation today Message-ID: May not be relavent since the AMT is currently shut down, but I have removed my reservation for this evening from 17:30-20:30. Problems with tylanbpsg have made it impossible for me to have my wafers ready for the AMT. Brian _____________________________________________________________ Brian J. Greene Office: CIS-X 128X Applied Physics Dept, MC 4090 Phone: (650) 723-4194 ext 5 Stanford University Pager: (650) 354-9687 Stanford, CA 94305-4090 Fax: (650) 723-4659 From latta at snf.stanford.edu Wed Sep 5 13:05:38 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 05 Sep 2001 13:05:38 -0700 Subject: Etch rate results Message-ID: <3B968592.E98DDAD1@snf.stanford.edu> Folks, Several of you have reported changes in the etch rates of materials in the amtetcher after it's recent repairs. We did new etch rate tests today and below are the results. Program 3 was used for 3 mins and all four materials were run in tray 2. The rates reported today are compared with those Henry did about a month ago and rates that were recorded in 1996 (!). At this point we strongly caution users to establish their own etch rates for nitride. We continue to get conflicting information on the etch rate, esp of low stress nitride. Here are the results; Material Today Henry's 1996 LTO 409A/min 412A 411A Thermal Ox 368A/min 408A ~380A Pos Resist 75A/min 119A 97A LS Nitride 421A/min 235A 220A Please let us know the etch rates you get as least for the near future. Thanks, Nancy From beckwith at snf.stanford.edu Tue Sep 11 12:09:36 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Tue, 11 Sep 2001 12:09:36 -0700 (PDT) Subject: faulty cryo pump readings Message-ID: Folks: The cryo reading is running 30+. So far this has not caused the etcher to stop etching mid-run. And it should not cause the machine to do so. However, you cannot get the machine to run if the cryo is reading 30 or above. You will get an error message that says the cyro temp is too high. Push the temp button until you get the cryo reading (you may have to keep your finger on the button), wait until the temp read out drops below 30, then quickly push the run button. Sharleen From beckwith at snf.stanford.edu Tue Sep 11 17:16:06 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Tue, 11 Sep 2001 17:16:06 -0700 (PDT) Subject: amt is free...I finished early Message-ID: From beckwith at snf.stanford.edu Wed Sep 19 12:42:26 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Wed, 19 Sep 2001 12:42:26 -0700 (PDT) Subject: amt res cancelled... Message-ID: the machine is available for use until 6 pm...problems with tylanbpsg until early this morning, had to send my wafers back through again today. From bgreene at stanford.edu Thu Sep 20 07:18:32 2001 From: bgreene at stanford.edu (Brian Joseph Greene) Date: Thu, 20 Sep 2001 07:18:32 -0700 (PDT) Subject: Attn. AMT users Message-ID: I want to remind each of you to fill out the log sheets in the binder for the amtetcher each time you use the machine. The information in the logsheet is the only mechanism we have at this time to monitor machine usage, and the data can be very useful in determining the presence and potentially the cause of any machine troubles which may occur. I have noticed recently that some users have been less than diligent about filling these out. The recent history on Coral shows much more use than the log book would indicate. Please take the extra 15 seconds and record the data. Thanks, Brian From latta at snf.stanford.edu Thu Sep 27 13:58:19 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Thu, 27 Sep 2001 13:58:19 -0700 Subject: Polymer Etchback Program Message-ID: <3BB392EB.C73FFBD0@snf.stanford.edu> Amtetcher Users, Recently there have been concerns expressed about the polymer etchback program. The program is to be run only by staff members. As you have noticed, there is a witness wafer in the chamber which gives us an indication of the amount of polymer which has built up in the chamber. When the thickness reaches 15,000A, a staff member will run the etchback program until the wafer reads 1500A. That will be followed by a seasoning of 60 mins using Prog 3. By way of explanation, some of the non-standard programs are very sensitive to the presence of a baseline amount of polymer to maintain repeatable etchrates. Please be assured that the standard oxide etch program has not been compromised, but always establish etchrates for your work. Any deviations should be brought to the attention of staff responsible for the etcher. In summery, do not run the polymer etch program and please leave the witness wafer alone. Thanks for your attention, Henry, Nancy and Len From pascal_zwahlen at yahoo.com Fri Sep 28 12:50:35 2001 From: pascal_zwahlen at yahoo.com (Pascal Zwahlen) Date: Fri, 28 Sep 2001 12:50:35 -0700 (PDT) Subject: Cancelled res. from 2pm to 4pm Message-ID: <20010928195035.19013.qmail@web12701.mail.yahoo.com> I won't be able to use my reservation time on the AMTetcher today from 2 to 4pm. Sorry for the late notice. Pascal Zwahlen __________________________________________________ Do You Yahoo!? Listen to your Yahoo! Mail messages from any phone. http://phone.yahoo.com