From sethb at engineering.ucsb.edu Fri Aug 23 14:07:03 2002 From: sethb at engineering.ucsb.edu (sethb at engineering.ucsb.edu) Date: Fri, 23 Aug 2002 21:07:03 -0000 Subject: etch sidewalls Message-ID: does anyone know how to get vertical (or as nearly vertical as possible) sidewalls on the amt etcher? we're trying to etch through 3 microns of SiO2 using a PR mask with a ~1 micron thickness. our feature sizes vary down to about 0.5 microns and our gaps between features are 2 microns. thanks seth From hphan at snf.stanford.edu Mon Aug 26 14:34:12 2002 From: hphan at snf.stanford.edu (Henry Phan) Date: Mon, 26 Aug 2002 14:34:12 -0700 Subject: Arcing Problem Message-ID: <3D6A9ED4.341089A9@snf.stanford.edu> Dear user: Once again, we found the AMT is arcing without any report by the user today. This is not the first time. I had sent out the email to remind the users follow the procedure all the time. But some of them preferred to do it their way. From now on, I will keep checking the machine everyday. If anyone didn't follow the procedure; and I find out the machine has problem without his/her reporting. I will remove their name out of the list for a month and charge the equipment repairing time. Len shown me how to clean the arcing today and it took more than half day to do it. I knew some of you didn't check all the trays before and after the process. I just don't get it. It only takes five minutes to do it. We don't mind to repair the machine. All we need is the users to report the problem. Please let me know if you have any question. Thank you very much for your cooperation! -- Henry _ _ _ _ Henry Q. Phan Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650)725-3659 hphan at snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From hphan at snf.stanford.edu Fri Aug 30 13:25:13 2002 From: hphan at snf.stanford.edu (Henry Phan) Date: Fri, 30 Aug 2002 13:25:13 -0700 Subject: AMT Dummy Message-ID: <3D6FD4A9.A3CB12C6@snf.stanford.edu> Dear User: I have removed all the old dummy wafers from the AMT and replaced the new dummy wafers. I also ran a seasoning chamber for 15min. Everything looks good and have a nice long weekend!!!!! -- Henry _ _ _ _ Henry Q. Phan Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650)725-3659 hphan at snf.stanford.edu