etch sidewalls

sethb at engineering.ucsb.edu sethb at engineering.ucsb.edu
Fri Aug 23 14:07:03 PDT 2002


does anyone know how to get vertical (or as nearly vertical as possible) 
sidewalls on the amt etcher? we're trying to etch through 3 microns of SiO2 
using a PR mask with a ~1 micron thickness. our feature sizes vary down to 
about 0.5 microns and our gaps between features are 2 microns. 

thanks

seth



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